Integrated DSP Microphone Package for Beam Forming

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Solution Overview

Problem

Conventional MEMS microphones are limited by their device characteristics and physical constraints, which restrict acoustic characteristics and geometry, hindering the achievement of desirable beam forming and noise cancelling capabilities while maintaining a compact size.

Innovation Solution

A microphone package with an integrated digital signal processor (DSP) that includes multiple MEMS sensors, where the DSP forms part of the back cavities for these sensors, enabling improved beam forming and noise cancelling characteristics by processing data from each sensor to generate enhanced microphone patterns and signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional MEMS microphones use a single acoustic back cavity formed by the substrate and cover, then the device structure is simple, but the acoustic characteristics are limited and beam forming capability is insufficient

Engineering Contradiction:
Improveacoustic characteristicsVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the single acoustic back cavity into multiple separate back cavities (first back cavity and second back cavity), each associated with different MEMS sensors. This segmentation allows each cavity to be independently optimized for specific acoustic characteristics, enabling diverse beam forming patterns and improved noise cancelling capability while maintaining manageable structural complexity through systematic arrangement.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces spatial dimensionality by positioning multiple MEMS sensors and their corresponding back cavities in different spatial locations and orientations within the package. This multi-dimensional arrangement of sensors and cavities enables the system to achieve complex beam forming patterns and acoustic diversity that cannot be obtained with a single conventional back cavity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If multiple MEMS sensors are integrated in separate back cavities to improve beam forming and noise cancelling, then acoustic diversity is enhanced, but the physical size of the package increases

Engineering Contradiction:
Improveacoustic diversityVSAvoidpackage size
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The patent employs a nested arrangement where multiple back cavities are integrated within a compact package structure. The first and second back cavities are positioned adjacent to each other and share common structural elements, allowing the multiple cavities to be nested or tightly packed within the package volume, thereby achieving acoustic diversity without proportionally increasing the overall package size.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent combines multiple functional elements (multiple MEMS sensors, multiple back cavities, and signal processing components) into a single integrated package. By merging these elements in a compact arrangement with shared structural components and close spatial proximity, the system achieves enhanced acoustic diversity and beam forming capability while minimizing the increase in package volume.

Inventive Principle:
Principle #5Merging (Combining)

3Device complexity

If the digital signal processor forms part of the back cavities, then the device complexity is reduced and integration is improved, but the manufacturing precision requirements increase

Engineering Contradiction:
Improveintegration levelVSAvoidcavity formation precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The digital signal processor is designed to serve multiple functions: it processes signals from the MEMS sensors and simultaneously forms part of the back cavity structures. This multi-functionality reduces the overall device complexity by eliminating separate components, while the cavity formation is achieved through standard packaging techniques that balance integration benefits with manufacturability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10123112B2Microphone package with an integrated digital signal processor
Publication Date: 2018.11.06 INVENSENSE INC
  • US10123112B2 patent drawing
  • US10123112B2 patent drawing
  • US10123112B2 patent drawing

AI summary

Systems and techniques for providing improved beam forming functionality and/or improve noise cancellation functionality in a microphone package are presented. In an implementation, a device includes a first microelectromechanical systems (MEMS) sensor, a second MEMS sensor, and a digital signal processor. The first MEMS sensor is contained in a first back cavity within the device. The second MEMS sensor is contained in a second back cavity within the device. The digital signal processor generates a cardioid microphone pattern based on data associated with the first MEMS sensor contained in the first back cavity and other data associated with the second MEMS sensor contained in the second back cavity, where the digital signal processor forms at least a portion of the first back cavity and the second back cavity.