Dual-Actuation Electromechanical Microsystem for High-Amplitude Precision

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Solution Overview

Problem

Existing electromechanical microsystems face limitations in performance across parameters such as amplitude of movement, force deployed, precision, size, energy consumption, and frequency, often failing to provide a satisfactory combination of these attributes.

Innovation Solution

The development of an electromechanical microsystem that allows for double actuation on opposite faces, featuring a design with deformable membranes and transducers that induce movement through changes in external pressure, enabling increased amplitude and force while reducing energy consumption, and capable of operating over long distances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If existing microsystem designs are used, then device complexity is reduced, but performance across multiple parameters (amplitude, force, precision, energy consumption) is unsatisfactory

Engineering Contradiction:
ImproveperformanceVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The device is segmented into two separate actuation faces (first and second opposite faces), each with independent electromechanical transducers. This segmentation allows each face to be optimized independently while achieving combined performance benefits that resolve the contradiction between improved performance and device complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from single-face actuation to dual-face actuation, adding a spatial dimension to the actuation architecture. By utilizing both opposite faces of the cavity for actuation, the system achieves enhanced performance in amplitude and force while distributing complexity across two symmetric interfaces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Force

If single-face actuation is used, then device complexity is minimized, but actuation amplitude and force are limited

Engineering Contradiction:
Improveforce deployedVSAvoiddevice complexity
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

The total actuation force and amplitude requirements are segmented across two independent actuation faces. Each face contributes partially to the overall performance, and their combined effect achieves the desired force and amplitude levels without requiring a single overly complex actuation mechanism.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The actuation capabilities of two opposite faces are merged to achieve combined force and amplitude output. The synergistic effect of dual-face actuation produces greater total force and displacement than a single face could achieve alone, resolving the contradiction between force requirements and device complexity.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If larger displacement amplitude is achieved, then measurement precision for large-amplitude detection is improved, but energy consumption increases

Engineering Contradiction:
Improvedetection capabilityVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The dual-face actuation system enables periodic bidirectional movement, allowing the system to achieve large detection amplitudes through controlled oscillation between faces. This periodic action on both faces allows energy-efficient large-amplitude operation by utilizing the elastic recovery and alternating actuation of both sides.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The deformable medium and membranes provide self-service by enabling energy-efficient large-amplitude movement through their elastic properties. The system leverages the inherent elasticity of the deformable components to achieve large detection ranges without proportionally increasing energy consumption, as the elastic elements store and release energy during each actuation cycle.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed microsystem achieves improved performance by doubling actuation amplitude and maintaining energy efficiency, suitable for diverse applications requiring large travel and precise movement, while being compact and adaptable.

Implementation Method 1

a deformable medium 14 contained in a hermetic manner within said cavity 13, said deformable medium 14 being capable of transmitting a force exerted on it by the moving part 111a, 111b of each electromechanical transducer 11a, 11b

Methodology Applied
Scientific EffectHydraulic pressure transmission: Pascal's Law

Implementation Method 2

Each electromechanical transducer 11a, 11b comprises a moving part 111a, 111b capable of moving or being moved between at least two positions... The microelectromechanical system 1 is configured so that the movement of each electromechanical transducer 11a, 11b is a function of the change in external pressure

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP4098605B1Electromechanical microsystem
Publication Date: 2024.12.18 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4098605B1 patent drawingFigure 1A~1B
  • EP4098605B1 patent drawingFigure 1C
  • EP4098605B1 patent drawingFigure 2A

AI summary

The invention relates to a microelectromechanical system 1 comprising two electromechanical transducers 11a and 11b, a first deformable membrane 12, and a cavity 13 hermetically containing a deformable medium 14 that maintains a constant volume under the action of a change in external pressure. The first membrane forms at least part of a first wall of the cavity and has a free zone 121a to deform. The free zone cooperates with an external element 2 such that its deformation induces, or is induced by, a movement of the external element. The electromechanical transducers are configured such that: - a first electromechanical transducer 11a forms part of said first wall 131 of the cavity, and - a second electromechanical transducer 11b forms at least part of the wall 132 opposite said first wall 131 of the cavity.