Dual-Actuator Scanning Probe for Precision Surface Control

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Solution Overview

Problem

Existing scanning probe systems rely on a single driver for both approaching and retracting the probe, which limits optimization for specific functions and may result in damage to the sample or probe due to inadequate control over the probe's interaction with the surface.

Innovation Solution

The use of two drivers allows for optimized control of the probe's interaction with the sample, with the first driver managing the approach and retract phases and the second driver modifying the trajectory and force applied during measurement, enabling precise control to avoid damage and apply controlled forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single driver is used to move the probe repeatedly towards and away from the sample, then the device complexity is reduced, but the measurement precision and reliability deteriorate due to inability to optimize control for different phases

Engineering Contradiction:
Improvenumber of driversVSAvoidcontrol precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The single driver function is segmented into two separate drivers: a first driver (piezoelectric actuator) that moves the probe repeatedly towards and away from the sample, and a second driver (thermal actuator) that modifies the probe trajectory and controls interaction forces. This segmentation allows each driver to be optimized for its specific function, improving overall measurement precision while maintaining manageable system complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The second driver acts as an intermediary that modifies the probe's interaction with the sample surface. By introducing this intermediate control element, the system can precisely adjust the probe trajectory and applied forces without requiring the first driver to perform both coarse positioning and fine control functions, thereby enhancing measurement precision.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the probe is moved rapidly towards the sample to reduce measurement time, then productivity is improved, but the risk of damaging the sample or probe increases

Engineering Contradiction:
Improvemeasurement speedVSAvoiddamage risk
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The first driver performs the preliminary action of rapidly moving the probe towards the sample surface during the approach phase. The second driver is pre-positioned and activated to modify the trajectory precisely when the probe nears the surface, ensuring that high-speed approach does not result in damage while maintaining productivity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control system monitors the probe's position and interaction with the sample in real-time, using feedback signals to dynamically adjust the second driver's output. This feedback mechanism allows the system to maintain high approach speeds while automatically preventing damage by reducing forces when the probe interacts with the sample surface.

Inventive Principle:
Principle #23Feedback

3Productivity

If the intensity of the drive signal is increased to maximize the approach speed, then the productivity is improved, but the force applied to the sample during interaction becomes uncontrolled and potentially damaging

Engineering Contradiction:
Improveapproach speedVSAvoidinteraction force control
Core Design Contradiction:
ProductivityVSForce

Solution Approach 1:

The drive signal control is segmented into two independent control channels: the first driver receives a drive signal optimized for high-speed approach, while the second driver receives a separate control signal that specifically modulates the interaction force. This allows the approach speed to be maximized without compromising force control during sample interaction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system changes the control parameters independently for each driver: the first driver operates with high signal intensity for rapid approach, while the second driver's signal intensity is dynamically adjusted based on probe-sample interaction detection, thereby maintaining both high productivity and precise force control.

Inventive Principle:
Principle #35Parameter changes

4Device complexity

If a single driver is used for both approach and retract phases, then the device complexity is reduced, but the reliability deteriorates due to inability to optimize each phase independently

Engineering Contradiction:
Improvecontrol system complexityVSAvoidoperation reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The control system is segmented into two independent control channels, one for the first driver managing approach and retract phases, and another for the second driver optimizing interaction control. This segmentation improves reliability by allowing independent optimization of each control phase without increasing overall system complexity beyond manageable levels.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This dual-driver system enhances the precision and safety of scanning probe operations, allowing for accurate measurement and manipulation of the sample surface without causing damage, and enables controlled force application during measurement phases.

Implementation Method 1

a first driver (4) with a first driver input (5) arranged to receive a first drive signal (52) and arranged to move the base (2a) of the cantilever (2) repeatedly towards and away from a surface (7) of a sample in a series of cycles

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a second driver (30) with a second driver input (31) arranged to receive a second drive signal (59) and arranged to modify the shape of the cantilever (2) in response to modification of the second drive signal (59)

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP3308172B1Scanning probe system with two prove drivers
Publication Date: 2023.08.02 INFINITESIMA LTD
  • EP3308172B1 patent drawingFigure 1
  • EP3308172B1 patent drawingFigure 2
  • EP3308172B1 patent drawingFigure 3

AI summary

A scanning probe system with a probe comprising a cantilever extending from a base to a free end,and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.