Dual Arm Robot Independent Cylindrical Operation
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Solution Overview
Problem
Existing dual arm robots in the semiconductor industry cannot operate independently in cylindrical coordinates, limiting their flexibility and efficiency in vacuum transport modules and substrate processing systems.
Innovation Solution
A dual arm, cylindrical coordinate robot assembly with two SCARA arms sharing a common prismatic joint, allowing each arm to move independently with four degrees of freedom, including radial, rotational, and vertical movements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If existing dual arm robots are used in vacuum transport modules, then substrate handling can be performed, but the arms cannot operate independently in cylindrical coordinates, limiting flexibility and efficiency
Solution Approach 1:
The robot system is divided into two independent SCARA arms, each with its own actuation system. Each arm can be controlled independently to perform different tasks simultaneously, enabling versatile operations in substrate processing while maintaining a relatively simple individual arm structure.
Solution Approach 2:
The dual arm configuration with independent cylindrical coordinate operation enables the robot system to perform multiple functions: simultaneous substrate transfer, parallel processing operations, and flexible task allocation. Each arm can independently access different process modules, making the system universally applicable to various substrate processing scenarios.
2Productivity
If dual arm robots are used for substrate handling, then productivity can be improved, but the limitation of non-independent operation reduces efficiency in complex tasks
Solution Approach 1:
The robot system implements dynamic task allocation where the two arms can independently execute different trajectories and operations based on real-time requirements. The independent cylindrical coordinate operation allows each arm to dynamically adjust its path and speed, optimizing productivity for complex multi-step substrate processing tasks.
Solution Approach 2:
With independent operation capability, both arms can continuously perform useful actions simultaneously without waiting for the other arm to complete its cycle. One arm can load substrates while the other unloads, maintaining continuous productivity throughout the processing sequence.
Data Source
AI summary
A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.