Dual Robot Arm Parallel Paths for Compact Substrate Transport
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Solution Overview
Problem
Current substrate transport systems in clean or vacuum environments, such as semiconductor manufacturing, face challenges in minimizing footprint and cycle time while maintaining efficient substrate handling, particularly in environments where space and volume are limited.
Innovation Solution
A transport apparatus with robot arms of unequal link lengths, where each arm is connected to a drive system with motors that allow for coordinated movement along parallel and spaced paths, enabling efficient stacking and extension of substrates without rotating them, thus minimizing space usage and optimizing transport efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If robot arms with equal link lengths are used, then the structure is simpler and easier to manufacture, but the footprint and workspace volume cannot be minimized effectively
Solution Approach 1:
The patent applies asymmetry by configuring robot arms with unequal link lengths (first link length different from second link length). This asymmetric design allows the end effectors to follow parallel paths during substrate transport, enabling compact workspace arrangement and minimized footprint while maintaining operational capability. The unequal lengths create non-overlapping motion paths that optimize space utilization in the workspace.
2Area of stationary object
If multiple robot arms operate in close proximity, then space utilization improves, but substrate alignment and positioning precision become difficult to maintain
Solution Approach 1:
The patent segments the motion paths of multiple robot arms by configuring them to follow parallel but spatially separated trajectories. The unequal link lengths ensure that each arm operates in its own designated path zone, preventing interference between arms while maintaining precise substrate alignment. This path segmentation allows compact workspace arrangement without compromising positioning accuracy.
Solution Approach 2:
The asymmetric link length configuration creates inherently separated motion paths for multiple arms. By making the first and second link lengths different, the patent ensures that each arm follows a unique parallel path, preventing path collision and maintaining substrate alignment precision even when arms operate in close proximity.
3Productivity
If robot arms are extended to increase transport reach, then more substrates can be handled, but the cycle time increases and productivity decreases
Solution Approach 1:
The patent utilizes parallel motion paths arranged in different spatial dimensions (one above the other) to enable simultaneous substrate transport by multiple arms. This dimensional arrangement allows arms to operate independently without interfering with each other's motion, reducing wait times and improving throughput. The parallel paths enable coordinated multi-arm operation that increases productivity without extending individual arm travel time.
Data Source
AI summary
An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.