Dual-Arm Robot Layout for Multi-Level Semiconductor Maintenance
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Solution Overview
Problem
Existing maintenance and repair tasks in semiconductor facilities often require human workers to handle hazardous substances or repetitive tasks, necessitating a robot that can perform multiple tasks simultaneously and reach various positions and vertical levels like a human worker.
Innovation Solution
A robot apparatus with a first and second robot unit, each equipped with robot arms, tool replacement portions, and grippers, along with a work table and moving modules, controlled by a controller to perform tasks in multiple directions, enabling simultaneous and versatile operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single robot unit is used, then the device complexity is reduced, but the ability to perform multiple tasks simultaneously and reach various positions is limited
Solution Approach 1:
The robot system is divided into multiple independent robot units (first robot unit with first robot arm, second robot unit with second robot arm), each capable of performing different tasks. This segmentation allows simultaneous execution of multiple tasks while maintaining manageable complexity through modular design.
Solution Approach 2:
Each robot unit is equipped with tool replacement portions that can accommodate various tools (grippers, cleaners, fasteners), enabling the same robot structure to perform multiple different functions. This multi-functionality increases versatility without proportionally increasing structural complexity.
2Adaptability or versatility
If a fixed robot structure is used, then the device complexity is reduced, but the ability to reach various positions and vertical levels is limited
Solution Approach 1:
The robot arms are designed with multiple articulations that can rotate and adjust dynamically to reach various positions and vertical levels. The work table also incorporates moving modules that enable dynamic repositioning, allowing the system to adapt to different task requirements while maintaining a relatively simple base structure.
Solution Approach 2:
The system incorporates movement not only in horizontal planes but also in the vertical dimension through the work table's elevation capability and the robot arms' multi-axis articulation. This addition of vertical movement dimension significantly expands the reachable workspace without proportionally increasing structural complexity.
3Reliability
If manual operation is used, then the ease of operation is maintained, but human workers are exposed to hazardous substances and repetitive tasks
Solution Approach 1:
The robot system is designed to autonomously perform maintenance and repair tasks without human intervention. The controller automatically coordinates the robot units, tools, and work table movements to complete tasks such as bottle replacement, chamber cleaning, and bolt fastening, eliminating worker exposure to hazards while maintaining high automation levels.
Data Source
AI summary
Disclosed are a robot apparatus and a robot system. The robot apparatus includes a first robot unit supported by a frame structure and a second robot unit disposed under the frame structure and configured to move the first robot unit. The first robot unit includes first and second robot arms with first and second tool replacement portions. Tools to perform work are mounted on the replacement portions. A robot arm moving module is configured to move each of the first and second robot arms in a vertical direction. The robot system also includes a work table and a work table moving module configured to move the work table in all three directions. A controller inside the frame structure controls the movement of the robot arms and also of the work table.