Dual Axis Fluxgate Sensor Composite Magnetic Core
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Solution Overview
Problem
Conventional fluxgate sensors exhibit directional dependence, making it difficult to measure in-plane magnetic fields, which is essential for e-compass applications, and are often large and expensive due to the need for packaging-level integration.
Innovation Solution
The development of an Integrated Dual Axis Fluxgate Sensor using a composite-anisotropy magnetic core structure with alternating magnetic and insulating layers, fabricated using a wafer-level process, allowing for measurement in two orthogonal in-plane directions and reducing the need for packaging integration, thereby minimizing directional dependence and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional fluxgate sensors use packaging-level integration, then manufacturing precision can be maintained, but device complexity increases and cost increases
Solution Approach 1:
The patent merges multiple sensor axes (X and Y) into a single integrated fluxgate sensor structure. The magnetic core includes alternating magnetic layers with hard axes oriented in orthogonal directions, allowing both X and Y axis measurements to be performed by a single sensor device rather than requiring separate sensors, thereby reducing device complexity while maintaining manufacturing precision through wafer-level fabrication
Solution Approach 2:
The integrated fluxgate sensor performs multiple functions by measuring magnetic fields in both X and Y directions using a single device. The composite magnetic core structure with alternating hard-axis orientations enables the sensor to detect in-plane magnetic fields along orthogonal axes, providing multi-axis capability that would otherwise require multiple separate sensors
2Reliability
If magnetic films use hard-axis direction for measurement, then measurement stability is improved, but adaptability to measure in-plane magnetic fields deteriorates
Solution Approach 1:
The patent applies local quality by orienting the hard axes of different magnetic layers in different directions within the same magnetic core. Specifically, alternating magnetic layers have their hard axes oriented along orthogonal directions (e.g., X and Y axes), allowing each layer to provide stable measurement in its preferred direction while collectively enabling measurement capability in multiple in-plane directions
Solution Approach 2:
The patent uses composite materials by creating a magnetic core structure with alternating magnetic layers having different hard-axis orientations. This composite magnetic core combines materials and structures with different magnetic properties, allowing the sensor to achieve both stable measurement in the hard-axis direction and adaptability to measure in-plane magnetic fields through the combined response of multiple layers
3Volume of moving object
If fluxgate sensors are made compact through integration, then device size is reduced, but directional dependence increases
Solution Approach 1:
The patent segments the magnetic core into multiple alternating magnetic layers, each with its hard axis oriented in a different direction. This segmentation allows the sensor to compensate for directional dependence by combining the responses of multiple layers with different magnetic axis orientations, reducing the overall directional sensitivity while maintaining compact size through integration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances fluxgate sensitivity, reduces power consumption, and enables the monolithic integration of XY axis sensors, improving the ability to measure magnetic fields in multiple directions while decreasing the size and expense of the sensor.
Implementation Method 1
the alternating magnetic induction field B induces an alternating voltage in sense coil 112
Implementation Method 2
magnetic core structure 114 increases the magnitude of the magnetic induction field B until magnetic core structure 114 saturates
Data Source
AI summary
A method of fabricating fluxgate devices to measure the magnetic field in two orthogonal, in plane directions, by using a composite-anisotropic magnetic core structure.