Dual-Axis Micro-Mirror Optical Scanner for Compact Surface Scanning
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Solution Overview
Problem
Existing 2D micro-scanners face issues with compactness, alignment sensitivity, mechanical crosstalk, and limited flexibility in optical resolution, making them unsuitable for scanning surfaces with varying resolutions and extents.
Innovation Solution
An optical scanner comprising at least two elementary scanners with movable parts and optical phased arrays, where the main optical beam is partly extracted to scan surfaces along different directions, allowing for adjustable flexion and torsion, enabling scanning of surfaces with varying longitudinal and lateral angles, and featuring waveguides and optical phase shifters for enhanced resolution and compactness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple micro-mirrors are used to scan surfaces, then scanning coverage is improved, but device compactness deteriorates
Solution Approach 1:
The patent merges multiple scanning functions into a single micro-mirror by enabling it to oscillate about two non-parallel pivot axes simultaneously. This combining of multiple scanning planes into one component achieves comprehensive surface coverage while maintaining compact device volume, directly resolving the contradiction between scanning coverage and device compactness.
Solution Approach 2:
The single micro-mirror is designed to perform multiple scanning functions by oscillating about two different pivot axes (X2X2′ and Y2Y2′), making it a multi-functional component that can scan multiple surfaces or zones with different orientations, thereby achieving comprehensive coverage without requiring multiple separate mirrors.
2Measurement precision
If precise alignment of micro-mirrors is implemented, then scanning accuracy is improved, but device complexity increases
Solution Approach 1:
By merging the alignment requirements for multiple mirrors into a single micro-mirror with integrated dual-axis oscillation capability, the patent reduces the number of alignment interfaces. The single mirror design with pivot axes directly attached to the support structure eliminates the need for precise alignment between multiple separate components, thereby reducing device complexity while maintaining scanning accuracy.
3Volume of moving object
If a single micro-mirror oscillates about two non-parallel axes, then device compactness is improved, but mechanical crosstalk occurs
Solution Approach 1:
The patent segments the oscillation functions by providing two distinct pivot axes (X2X2′ and Y2Y2′) that are non-parallel to each other, allowing independent rotation about each axis. This segmentation of motion paths reduces mechanical coupling and crosstalk between scanning directions, maintaining reliability while achieving compactness through the single-mirror design.
Solution Approach 2:
The micro-mirror is constructed as a composite structure with a reflective surface layer and a support structure that provides the two pivot axes. This composite design allows independent oscillation about each axis while maintaining structural integrity, reducing mechanical crosstalk and improving reliability in the compact single-mirror configuration.
4Device complexity
If optical phased array with fixed resolution is used, then device simplicity is maintained, but adaptability in optical resolution deteriorates
Solution Approach 1:
The patent implements dynamic adaptability by allowing the optical phased array to extract multiple beams from a single incident beam and independently control their directions and resolutions. This dynamic configuration capability enables the system to adapt to different scanning requirements (different surfaces, zones, and resolutions) without changing the physical structure, thereby achieving versatility while maintaining relative simplicity.
Solution Approach 2:
The optical phased array segments the single incident beam into multiple extracted beams, each capable of independent directional control and resolution adjustment. This segmentation allows different portions of the scanned surface to be imaged at different resolutions simultaneously, providing adaptability while maintaining the simplicity of a single optical source.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a flexible and compact optical scanning system capable of scanning surfaces with varying resolutions without the need for precise alignment, reducing mechanical crosstalk, and maintaining high scanning quality across different surface extents.
Implementation Method 1
Each of these optical sources is moreover associated with phase modulation means for phase shifting optical radiations with respect to each other so as to vary the angle of propagation of the combined radiation emitted by all the optical sources
Implementation Method 2
a first and a second actuator arranged to impose flexion or torsion, respectively, to the first and the second movable parts
Implementation Method 3
a first and a second actuator arranged to impose flexion or torsion, respectively, to the first and the second movable parts
Data Source
AI summary
A scanner provided with a plurality of elementary scanners, especially two elementary scanners, referred to as a first and second scanner respectively. In particular, the first scanner and the second scanner are arranged to scan, each with an optical beam, respectively, a first surface and a second surface included in the first surface and of a smaller extent than the latter.