Dual-Axis Piezo Optical Deflector for 2D Resonant Scanning

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Solution Overview

Problem

Existing optical deflectors struggle to efficiently actuate a mirror in two dimensions using piezoelectric excitation, limiting their ability to control laser beam deflection with a single mirror.

Innovation Solution

An optical deflector design featuring a mirror pivotally connected to holders about two orthogonal axes, with piezoelectric actuators mechanically coupled to the holders, allowing for the excitation of orthogonal resonating oscillation modes to control the mirror's pivoting in two dimensions through resonant oscillation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If piezoelectric actuators are used to move a mirror in two dimensions, then the mirror can be actuated with a single device, but efficient control in two dimensions with resonant excitation is not achieved

Engineering Contradiction:
Improvemirror actuation systemVSAvoidcontrol efficiency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent divides the mirror actuation into two independent rotational degrees of freedom, each controlled by separate piezoelectric actuators. The mirror is mounted on a dual-axis gimbal mechanism where the first piezoelectric actuator controls rotation about the first axis and the second piezoelectric actuator controls rotation about the second axis, enabling independent control of each rotational mode for efficient resonant actuation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs piezoelectric actuators that can simultaneously provide both static positioning and dynamic resonant excitation capabilities. These actuators are designed to operate in dual modes: quasi-static mode for precise positioning and resonant mode for high-speed scanning, making the actuation system universally applicable for different operational requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Use of energy by moving object

If resonant excitation is used for mirror movement, then actuation efficiency is improved, but control in two dimensions is not achieved

Engineering Contradiction:
Improveactuation efficiencyVSAvoidtwo-dimensional control
Core Design Contradiction:
Use of energy by moving objectVSAdaptability or versatility

Solution Approach 1:

The patent segments the resonant excitation control into two independent channels, each targeting a specific rotational axis. The first piezoelectric actuator generates resonant oscillations about the first axis while the second piezoelectric actuator generates resonant oscillations about the second axis, allowing both axes to be efficiently actuated at their respective resonance frequencies simultaneously.

Inventive Principle:
Principle #1Segmentation

3Device complexity

If a single mirror is used for two-dimensional deflection, then device complexity is reduced, but efficient piezoelectric actuation in two dimensions is not achieved

Engineering Contradiction:
Improvenumber of mirrorsVSAvoidtwo-dimensional actuation
Core Design Contradiction:
Device complexityVSEase of operation

Solution Approach 1:

The patent transforms the static mounting of a single mirror into a dynamic dual-axis gimbal structure. The mirror is mounted on rotating axes that allow it to change orientation in two independent directions. The piezoelectric actuators dynamically adjust the mirror's angular position about both axes, enabling flexible two-dimensional beam deflection while maintaining a single mirror configuration.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and efficient control of the mirror's movement in two dimensions, reducing optical aberrations and enhancing the robustness of the deflection system, allowing for effective laser beam manipulation.

Implementation Method 1

piezoelectric actuators are mechanically coupled to the second holder, wherein upon application of a driving voltage to the piezoelectric actuators two orthogonal resonating oscillation modes are excitable

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

two orthogonal resonating oscillation modes are excitable, one of the resonating modes corresponding to a pivoting of the mirror about the first axis and the other one corresponding to a pivoting of the mirror about the second axis

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP4202529A1Optical deflector and method operating an optical deflector
Publication Date: 2023.06.28 SILICON AUSTRIA LABS GMBH
  • EP4202529A1 patent drawingFigure 1~2
  • EP4202529A1 patent drawingFigure 3~4
  • EP4202529A1 patent drawingFigure 5~6

AI summary

The invention concerns an optical deflector (1), comprising a mirror (2), a first holder (3) and a second holder (4), the mirror (2) being pivotally connected to the first holder (3) about a first axis (A) and the first holder (3) being pivotally connected to the second holder (4) about a second axis (B), wherein the first axis and the second axis being aligned at an angle, in particular perpendicularly to one another; wherein piezoelectric actuators (6) are mechanically coupled to the second holder (4), wherein upon application of a driving voltage to the piezoelectric actuators (6) two orthogonal resonating oscillation modes are excitable, one of the resonating oscillation modes corresponding to a pivoting of the mirror (2) about the first axis (A) and the other one corresponding to a pivoting of the mirror (2) about the second axis (B). Furthermore, the invention concerns a method operating an optical deflector (1).