Dual-Axis Specimen Holder Motion for Streak-Free Ion Beam Machining
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Solution Overview
Problem
Existing specimen machining devices using ion beams often result in machining streaks on the specimen surface and limited machining range due to the lack of effective rotation mechanisms.
Innovation Solution
A specimen machining device with a dual rotating mechanism, where the specimen is irradiated with an ion beam while being moved by the rotation of a first rotating body about a first axis and a second rotating body about a different axis, reducing streaks and extending the machining range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single rotation mechanism is used to move the specimen during ion beam irradiation, then the machining width can be increased, but machining streaks appear on the specimen surface
Solution Approach 1:
The rotation mechanism is divided into two independent rotating bodies: a first rotating body that rotates the specimen holder about a first axis, and a second rotating body that rotates the specimen stage about a second axis. This segmentation allows each rotation to contribute differently to the overall specimen movement, enabling the specimen to be irradiated from multiple directions and preventing machining streaks while maintaining increased machining width.
Solution Approach 2:
The invention introduces rotation about a second axis that is different from the first axis, adding a dimensional aspect to the specimen movement. This multi-axis rotation creates a more complex movement trajectory that prevents the ion beam from consistently striking the same linear path on the specimen surface, thereby eliminating machining streaks while expanding the effective machining area.
2Device complexity
If the specimen is irradiated with an ion beam along a fixed path, then the machining process is simple, but the machining range is limited and machining streaks occur
Solution Approach 1:
The invention transforms the static, fixed-path irradiation into a dynamic process where the specimen is continuously moved along a complex trajectory by two independent rotation mechanisms. This dynamic movement allows the ion beam to cover a larger area and prevents the formation of machining streaks, effectively increasing the machining range while maintaining operational simplicity through automated control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dual rotating mechanism effectively reduces machining streaks and increases the machining width of the specimen, enhancing the precision and efficiency of specimen preparation for electron microscopy and other analytical tools.
Implementation Method 1
an ion source which irradiates a specimen with an ion beam
Data Source
AI summary
A specimen machining device includes an ion source which irradiates a specimen with an ion beam, a first rotating body (specimen holder) that holds the specimen and is rotatable about a first axis serving as a rotation axis, and a second rotating body on which the first rotating body is disposed and which is rotatable about a second axis serving as a rotation axis different from the first axis. The specimen machining device irradiates the specimen with the ion beam while moving the specimen by the rotation of the first rotating body and the rotation of the second rotating body.