Dual-Band Image Sensor Layout Without Middle-Layer Contacts

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Solution Overview

Problem

Existing dual-band image sensors face challenges in fabrication complexity, low yield, and scalability issues, particularly in simultaneous mode operations, and are not compatible with unipolar two-color designs using thin barrier layers.

Innovation Solution

A method for fabricating simultaneous dual-band image sensors with a simpler process involves forming a common ground substrate, layering absorber and diode layers, and creating ring openings to define contacts for each band, allowing for independent and simultaneous signal collection from both bands without requiring middle layer contacts or dopant implantation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a simultaneous dual-band image sensor is fabricated using prior art methods with middle layer contacts or dopant implantation, then dual-band sensing capability is achieved, but fabrication complexity increases and yield decreases

Engineering Contradiction:
Improvefabrication yieldVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent removes the middle layer contact structure from the device architecture. By eliminating this intermediate contact layer, the fabrication process is simplified and yield is improved, while still achieving simultaneous dual-band sensing through the use of two separate bump contacts on the top layer that directly access the nBn regions for each band.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The device is segmented into distinct functional regions with separate nBn structures for Band 1 and Band 2, each with its own contact region. This segmentation allows independent optimization of each band's sensing path and simplifies the overall fabrication by avoiding complex inter-layer connections.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If two or three bumps are required per pixel for simultaneous mode operation, then both bands can be sensed simultaneously, but fabrication becomes very challenging

Engineering Contradiction:
Improvesimultaneous dual-band operationVSAvoidfabrication ease
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent merges the contact structure into a single top layer where both Band 1 and Band 2 contacts are formed. Instead of requiring separate middle layer contacts for each band, the design uses two bump contacts on the top layer that access the respective nBn regions, simplifying the manufacturing process while maintaining simultaneous dual-band capability.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If dopant implantation or middle layer contact steps are used, then electrical connection is achieved, but scalability to reduced pitch size or increased format size is hampered

Engineering Contradiction:
Improveelectrical connection precisionVSAvoidscalability
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent extracts the middle layer contact step from the fabrication process. By forming contacts only on the top layer through simple bump formation and etching, the process becomes scalable to smaller pitch sizes and larger format sizes without the complications of aligning and forming contacts through multiple layers.

Inventive Principle:
Principle #2Taking out (Extraction)

4Ease of manufacture

If traditional photodiode detectors are used, then established fabrication processes can be employed, but unipolar two-color designs with thin barrier layers cannot be implemented

Engineering Contradiction:
Improvefabrication process familiarityVSAvoidunipolar design compatibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent changes the detector type from traditional photodiodes to unipolar nBn detectors with thin barrier layers. This parameter change enables new functionality for simultaneous dual-band operation while the simplified contact structure (without middle layers) makes the fabrication equally accessible to manufacturers familiar with traditional processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables scalable, high-yield production of dual-band image sensors that can operate simultaneously, improving fabrication simplicity and compatibility with unipolar designs, allowing for efficient collection of signals from two electromagnetic bands.

Implementation Method 1

forming a Band 1 absorber layer on the common ground layer, forming a barrier layer on the Band 1 absorber layer, forming a Band 2 absorber layer on the barrier layer

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS11749705B2Simultaneous dual-band image sensors
Publication Date: 2023.09.05 HRL LAB
  • US11749705B2 patent drawing
  • US11749705B2 patent drawing
  • US11749705B2 patent drawing

AI summary

A simultaneous dual-band image sensor having a plurality of pixels includes a substrate, a common ground on the substrate, wherein each pixel includes a Band 1 absorber layer on the common ground layer, a barrier layer on the Band 1 absorber layer, a Band 2 absorber layer on the barrier layer, a ring opening in the pixel formed by a removed portion of the Band 2 absorber layer, a removed portion of the barrier layer and a removed portion of the Band 1 absorber layer, wherein the ring opening does not extend through the Band 1 absorber layer, a first contact on a portion of the Band 2 absorber layer inside the ring, and a second contact on a portion of the Band 2 absorber layer outside the ring. The Band 1 absorber layer and the Band 2 absorber layer are n-type, or the Band 1 absorber layer and the Band 2 absorber layer are p-type.