Dual-Beam Ion Alignment Using CPB Lens Feedback Imaging
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Solution Overview
Problem
Dual-beam instruments, such as those using ion and electron beams, face performance issues due to beam splitting caused by charged-particle-beam (CPB) lenses, leading to misalignment and requiring manual, inaccurate adjustments, which are time-consuming and can damage samples.
Innovation Solution
An automated method using image analysis techniques to quantify beam splitting and optimize the setting of CPB lenses in electron-beam instruments, reducing misalignment by acquiring images with varying lens settings and applying Fourier-transform operations to determine the optimal lens configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual adjustment of CPB lenses is performed to correct beam splitting, then beam alignment can be corrected, but the process is time-consuming and can damage samples
Solution Approach 1:
The system performs automated beam alignment by acquiring images, analyzing beam splitting through FFT operations, and adjusting CPB lens settings without requiring manual intervention. The instrument self-corrects the beam alignment issue that would otherwise require time-consuming manual adjustment by an operator.
Solution Approach 2:
The patent replaces manual mechanical adjustment of CPB lenses with an automated control system that uses image analysis and computational algorithms (FFT operations) to determine optimal lens settings. This substitution eliminates the need for physical manual manipulation and replaces it with automated electronic control based on image data.
2Measurement precision
If manual adjustment of CPB lenses is performed to correct beam splitting, then beam alignment can be corrected, but the adjustments are inaccurate and can damage samples
Solution Approach 1:
The automated system objectively measures beam splitting through image acquisition and FFT analysis, eliminating subjective human judgment errors. The system self-determines the precise lens settings needed for alignment, ensuring accurate correction without the inaccuracy and potential sample damage associated with manual adjustments.
Solution Approach 2:
The system acquires images showing beam positions, analyzes them through FFT operations to quantify beam splitting, and uses this feedback information to determine the optimal CPB lens settings. This closed-loop feedback mechanism ensures accurate alignment by continuously monitoring beam positions and adjusting settings based on measured deviations.
3Measurement precision
If automated image processing is applied to quantify beam splitting, then alignment accuracy is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex manual alignment procedures with automated image processing and computational algorithms. The FFT-based analysis system substitutes for the complexity of manual visual assessment and adjustment, providing more accurate measurements through computational methods while automating the entire alignment process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the accuracy and efficiency of dual-beam instrument operations by automatically adjusting CPB lenses, reducing setup time and minimizing beam splitting, thereby enhancing imaging and characterization capabilities.
Implementation Method 1
a charged-particle-beam (CPB) lens having an adjustable setting controlling a magnetic force applied to the first and second sub-beams
Implementation Method 2
an ion-beam instrument of the dual-beam instrument is configured to generate an ion beam, the ion beam including first and second sub-beams
Data Source
AI summary
Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. For example, some embodiments provide a scientific instrument comprising an ion-beam instrument configured to generate an ion beam including first and second sub-beams; an electron-beam instrument including a charged-particle-beam (CPB) lens having an adjustable setting controlling a magnetic force applied to the first and second sub-beams; and a computing device. The computing device is configured to: acquire an image by causing the ion-beam instrument to scan the ion beam across a sample using a selected setting of the CPB lens of the electron-beam instrument, apply automated image processing to the image to quantify an amount of spatial misalignment of the first and second sub-beams at the sample, and control the CPB lens of the electron-beam instrument to a setting based on the amount of spatial misalignment within the image.