Dual-Cam Gate Valve Layout for Low-Height Chamber Isolation
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Solution Overview
Problem
Existing gate valves between adjacent chambers in semiconductor manufacturing apparatuses have a heightened structure due to the drive mechanism, making it difficult to install them in spaces with limited height, which is undesirable for reducing equipment size.
Innovation Solution
A gate valve design with a bonnet partitioning the upper and lower sides, utilizing an air cylinder with separate drive rods and a power transmission mechanism that includes cam frames and rollers to move the valve assembly in both the axial and thickness directions, allowing for separate opening and closing of openings without increasing the overall height.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a one cam groove extending in the up-down direction is used to guide the valve shaft operation, then the valve assembly can move to each position, but the drive mechanism height is increased, thus increasing the overall gate valve height
Solution Approach 1:
The patent changes the orientation of the cam groove from the vertical direction (up-down along valve shaft axis) to the horizontal direction (left-right perpendicular to valve shaft axis). This dimensional change allows the cam mechanism to achieve the same valve positioning functionality while reducing the vertical height of the drive mechanism, thereby solving the contradiction between operational capability and compact height.
2Length of stationary object
If the gate valve height is reduced to fit limited installation space, then equipment size is minimized, but the drive mechanism may not have sufficient space for conventional cam groove configuration
Solution Approach 1:
The patent employs asymmetric arrangement of the cam groove and cam roller, positioning them perpendicular to the conventional alignment. The cam groove is configured to extend in the left-right direction while the cam roller engages from the side, creating an asymmetric layout that reduces vertical height while maintaining functional integrity of the drive mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces the height of the gate valve by enabling the valve assembly to reciprocate between retracted, closed, and intermediate positions using separate cam grooves and rollers, thus minimizing the overall height of the gate valve.
Implementation Method 1
a first cam groove provided in one of the first cam frame and the lever member, and a first cam roller provided on another of the first cam frame and the lever member, the first cam roller being slidably fitted into the first cam groove
Data Source
AI summary
A first opening and closing mechanism, which includes a first cam groove and a first cam roller and which causes a valve assembly to reciprocate between an intermediate position and a first closed position, and a second opening and closing mechanism, which includes a second cam groove and a second cam roller and which causes the valve assembly to reciprocate between the intermediate position and a second closed position, are provided so as to be operable separately, the first and second opening and closing mechanisms being disposed adjacent to each other in a thickness direction D of a gate valve.