Dual-Cell MEMS Airflow Generation With Virtual Valve Flaps
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Solution Overview
Problem
Existing MEMS air pulse generating devices face challenges in providing significant airflow due to limitations in design and fabrication, necessitating an improvement in airflow generation capabilities.
Innovation Solution
The device employs a dual-cell structure with opposite polarities of air pressure generated by first and second cells, combined with synchronized common-mode and differential-mode movements of flap pairs to create virtual valves, allowing for enhanced airflow generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single cell structure is used in MEMS air pulse generating devices, then the device size remains small, but the airflow generation capability is limited
Solution Approach 1:
The device is divided into multiple independent cells (first cell and second cell) with different polarities. Each cell can generate air pressure independently, and their combined output significantly enhances airflow generation capability compared to a single cell structure.
Solution Approach 2:
Multiple cells with opposite polarities are merged into a single device structure. The first cell generates positive air pressure while the second cell generates negative air pressure, and their combined effect produces enhanced airflow output.
2Productivity
If flap pairs perform only common-mode movement, then the structure is simple, but airflow generation is insufficient
Solution Approach 1:
The flap pairs are designed to perform both common-mode movement (in-phase) and differential-mode movement (out-of-phase). This dynamic control allows the flaps to function as virtual valves that open and close at appropriate times, enhancing airflow generation while managing ultrasonic energy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in improved airflow performance, with increased airflow velocity and reduced ultrasonic energy leakage, making the device more robust and efficient in generating significant airflow.
Implementation Method 1
The first cell is disposed within a first region and generates a first air pressure with a first polarity. The second cell is disposed within a second region and generates a second air pressure with a second polarity, wherein the second polarity is opposite to the first polarity.
Implementation Method 2
a film structure, configured to perform a movement to push or pull a volume over the film structure to generate a positive pressure and a negative pressure
Implementation Method 3
a flap pair, comprising a first flap and a second flap opposite to each other, configured to perform a differential movement to form a virtual valve; wherein the differential movement performed by the flap pair is synchronized with the movement performed by the film structure; wherein an airflow is formed when the virtual valve is opened.
Data Source
AI summary
An airflow generating device includes a first cell and a second cell. The first cell is disposed within a first region and generates a first air pressure with a first polarity. The second cell is disposed within a second region and generates a second air pressure with a second polarity. The second polarity is opposite to the first polarity.