Dual-Chamber Pressure Control With Stepped Pressurization Limits
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Solution Overview
Problem
Existing dual-chamber pressure control systems in semiconductor processing face challenges in controlling pressure differences between internal and external chambers, leading to potential damage from excessive pressure and difficulties in recovering and reusing reactive gases.
Innovation Solution
A dual-chamber pressure control method and device utilizing stepped pressure adjustments managed by external and internal chamber pressure control modules, with protection components to ensure safe pressure limits and prevent gas mixing, allowing for controlled pressure adjustments and gas recovery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pressure difference method is used to control pressure in dual-chamber system, then pressure control is achieved, but pressurization speed is too fast causing excessive pressure and potential damage to internal chamber body
Solution Approach 1:
The pressure control process is divided into multiple stages with different pressure adjustment rates. The method segments the pressurization into initial stage (first pressure adjustment rate), intermediate stage (second pressure adjustment rate), and final stage (third pressure adjustment rate), allowing controlled speed reduction to prevent excessive pressure while maintaining efficiency.
Solution Approach 2:
The pressure adjustment rate is made dynamic rather than static. The system automatically adjusts the pressure adjustment rate based on the current pressure state and stage, transitioning from faster rates when pressure is low to slower rates as pressure approaches target, optimizing both speed and safety throughout the process.
2Reliability
If pressure difference method is used, then pressure control is achieved, but pressure difference between internal and external chamber is difficult to control
Solution Approach 1:
The system continuously monitors the pressure difference between internal and external chambers and uses this feedback to adjust the pressure adjustment rate. When the pressure difference approaches the preset maximum value, the system automatically reduces the pressurization rate, ensuring stable and controllable pressure difference throughout the process.
Solution Approach 2:
The system performs preliminary pressure adjustment in the external chamber before adjusting internal chamber pressure. This staged approach allows the external chamber pressure to be established first, providing a stable reference for subsequent internal chamber pressure control and simplifying the overall pressure difference management.
3Reliability
If reactive gas and inert gas are mixed in pressure control valve after annealing process, then pressure equalization occurs, but reactive gas recovery and reuse becomes difficult
Solution Approach 1:
The system extracts and separates the reactive gas from the mixed gas stream before discharge. By introducing a separation mechanism that removes reactive gas from the pressure control valve outlet, the system enables reactive gas recovery and reuse while allowing the inert gas to be discharged, thus preventing contamination and material loss.
Solution Approach 2:
A gas separation device acts as an intermediary between the pressure control valve and the discharge path. This intermediary component selectively separates reactive gas from inert gas, allowing reactive gas to be routed to recovery systems while inert gas is discharged, thus solving the mixing problem without compromising pressure equalization.
Data Source
AI summary
A dual-chamber pressure control method and a dual-chamber pressure control device are described. The dual-chamber pressure control method uses a stepped pressure adjustment to ensure that the pressure adjustment at each stage will not exceed a safe value of an internal chamber body. The dual-chamber pressure control device includes a dual-chamber member, an external chamber pressure control module, and an internal chamber pressure control module. The external chamber pressure control module is used to adjust an external chamber pressure of the dual-chamber member, such that an external chamber pressure value changes with time to show a stepped external chamber pressure adjustment line. The internal chamber pressure control module is used to adjust an internal chamber pressure of the dual-chamber member, such that an internal chamber pressure value changes with time to show a stepped internal chamber pressure adjustment line.