Dual Chiller Substrate Temperature Control
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Solution Overview
Problem
Existing inspection systems face challenges in accurately adjusting the temperature of a substrate based on thermal resistance between the substrate and the flow passage, leading to temperature deviations during inspection processes.
Innovation Solution
The system employs a dual chiller unit setup with a controller that mixes heating media at different temperatures and adjusts the mixing ratio based on temperature and flow rate measurements to correct for thermal resistance, ensuring precise temperature control of the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single temperature control system is used, then the device complexity is reduced, but the temperature adjustment precision according to thermal resistance is insufficient
Solution Approach 1:
The temperature control system is segmented into multiple independent chiller units (first chiller unit and second chiller unit), each capable of providing heating medium at different temperatures. This segmentation allows precise temperature adjustment by mixing heating media from different sources, directly addressing the need for higher temperature control precision while managing system complexity through modular design.
Solution Approach 2:
The system changes the temperature parameter of the heating medium by mixing heating media at different temperatures from multiple chiller units. By adjusting the mixing ratio of heating media with different temperatures, the system can precisely control the substrate temperature according to thermal resistance variations, achieving high temperature adjustment precision through parameter variation.
2Reliability
If temperature control is performed without considering thermal resistance, then the ease of operation is improved, but the temperature stability deviates from set temperature
Solution Approach 1:
The system implements feedback control by measuring the temperatures of heating medium at inlet and outlet of the flow passage, calculating the temperature difference, and using this information to adjust the mixing ratio of heating media. This feedback mechanism ensures temperature stability by continuously compensating for thermal resistance effects, while the automated control maintains ease of operation.
Solution Approach 2:
The system performs preliminary temperature adjustment by pre-mixing heating media at different temperatures before they reach the substrate. By calculating the required mixing ratio in advance based on thermal resistance characteristics and target temperature, the system prepares the optimal heating medium temperature profile beforehand, ensuring both temperature stability and operational simplicity.
3Productivity
If heating medium temperature is not adjusted dynamically, then the device complexity is reduced, but the inspection time increases due to slow temperature stabilization
Solution Approach 1:
The system dynamically adjusts the temperature of the heating medium by varying the mixing ratio of heating media from different chiller units in real-time. This dynamic control allows rapid temperature stabilization to match the substrate's thermal resistance characteristics, significantly reducing inspection time while the automated control system manages the complexity of real-time adjustments.
Solution Approach 2:
The system changes the temperature parameter of the heating medium dynamically by adjusting the mixing ratio of heating media at different temperatures. This parameter change enables rapid adaptation to thermal resistance variations, achieving quick temperature stabilization and reducing inspection time, with the control system managing the complexity through automated parameter adjustment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for dynamic temperature adjustment of the substrate, maintaining set temperatures despite thermal resistance, thereby improving inspection accuracy and reducing time by quickly stabilizing the temperature.
Implementation Method 1
a first chiller unit configured to supply a first heating medium controlled to a first temperature; a second chiller unit configured to supply a second heating medium controlled to a second temperature lower than the first temperature
Implementation Method 2
the controller controls a process of measuring a temperature of the heating medium at an inlet of the flow passage and a temperature of the heating medium at an outlet of the flow passage, and a process of correcting the mixing ratio of the first heating medium and the second heating medium, based on a difference between the temperatures of the heating medium at the inlet and outlet
Data Source
AI summary
An inspection system includes first and second chiller units which supply first and second heating media controlled to first and second temperatures, respectively, where the second temperature is lower than the first temperature, a stage having a flow passage supplied with a heating medium mixed with the first and the second heating media at a desired mixing ratio, and a controller. The inspection system performs an inspection with respect to a substrate placed on the stage. The controller controls a process of measuring a temperature of the heating medium at an inlet of the flow passage and a temperature of the heating medium at an outlet of the flow passage, and a process of correcting the mixing ratio of the first and second heating media, based on a difference between the temperatures of the heating medium at the inlet and outlet, and a flow rate of the heating medium.