Dual Chuck Laser Processing with Optical Beam Scanning

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Solution Overview

Problem

Existing laser processing apparatuses fail to fully exploit the characteristics of the laser beam applying unit, resulting in inefficient processing due to their design based on cutting apparatuses, which limits processing speed and efficiency.

Innovation Solution

A laser processing apparatus with a first and second chuck table, an X-axis feed unit, and a laser beam applying unit that includes a laser oscillator, beam condenser, and a scanning unit, allowing for high-speed scanning without moving the chuck table, along with delivery areas for efficient loading and unloading of workpieces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a laser processing apparatus is designed based on the cutting apparatus structure with a chuck table, then the apparatus structure is simplified and easier to manufacture, but the processing speed is limited by the chuck table movement speed

Engineering Contradiction:
Improveapparatus structureVSAvoidprocessing speed
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The patent replaces the mechanical chuck table movement system with an optical laser beam scanning system. The laser beam is deflected by a scanning unit (galvanometer mirrors or polygon mirror) to move the processing spot across the workpiece surface without physically moving the workpiece or a large mechanical table, thereby achieving high-speed processing while maintaining structural simplicity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a scanning dimension by deflecting the laser beam in multiple directions using scanning mirrors. This allows the processing spot to cover the entire workpiece surface by moving the beam in X and Y directions independently, achieving area processing through optical dimensionality rather than mechanical table movement

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the chuck table is moved to process different areas of the workpiece, then the entire workpiece surface can be accessed, but the processing speed is limited by the table movement speed

Engineering Contradiction:
Improveworkpiece coverageVSAvoidprocessing speed
Core Design Contradiction:
Adaptability or versatilityVSSpeed

Solution Approach 1:

The patent replaces mechanical table movement with optical beam scanning. The scanning unit uses galvanometer mirrors or polygon mirrors to rapidly deflect the laser beam across the workpiece surface, achieving full coverage without mechanical movement, thereby maintaining versatility while dramatically increasing processing speed

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements dynamic beam scanning where the laser beam position is rapidly changed by rotating mirrors during processing. This dynamic optical steering allows the processing spot to adaptively follow any predetermined path across the workpiece surface at high speed, providing both full coverage and fast processing

Inventive Principle:
Principle #15Dynamics

3Speed

If a laser beam scanning unit is added to enable high-speed scanning, then processing speed is improved, but the apparatus complexity increases

Engineering Contradiction:
Improveprocessing speedVSAvoidapparatus structure
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent uses a scanning unit that serves multiple functions: it deflects the laser beam in multiple directions, enables area processing, and can be controlled to follow complex processing paths. This single scanning subsystem replaces what would otherwise require complex mechanical table movements and positioning systems, achieving high speed without excessive complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces a scanning unit as an intermediary between the laser source and the workpiece. This scanning unit acts as a beam steering mechanism that decouples the laser source from direct mechanical movement, allowing the laser to remain stationary while the beam position is dynamically controlled through optical elements, thereby simplifying the overall system architecture

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient laser processing by utilizing the laser beam applying unit's features for high-speed scanning and processing across the entire surface without moving the chuck table, enhancing processing speed and efficiency.

Implementation Method 1

a laser oscillator for emitting a laser beam

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

a beam condenser for condensing the laser beam emitted from the laser oscillator

Methodology Applied
Scientific EffectOptical focusing: Focusing

Implementation Method 3

a laser beam scanning unit disposed between the laser oscillator and the beam condenser, for displacing a position where the laser beam is applied to the holding surface

Methodology Applied
Scientific EffectOptical deflection: Reflection

Data Source

PatentUS11534862B2Laser processing apparatus
Publication Date: 2022.12.27 DISCO CORP
  • US11534862B2 patent drawing
  • US11534862B2 patent drawing
  • US11534862B2 patent drawing

AI summary

A laser processing apparatus includes two chuck tables for holding workpieces on their holding surfaces, an X-axis feed unit for moving the chuck tables which are being arrayed in an X-axis direction, a laser beam applying unit for applying a laser beam to the workpiece on one at a time of the chuck tables to process the workpiece, and a pair of delivery areas arrayed in the X-axis direction on both sides of the laser beam applying unit, for delivering workpieces to and from the chuck tables. The laser beam applying unit includes a laser oscillator, a beam condenser, and a laser beam scanning unit for displacing a position where the laser beam is applied to the holding surface of the one of the chuck tables.