Dual-Chuck Substrate Tank Transfer for Higher Throughput
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Solution Overview
Problem
Existing substrate processing devices have limited throughput due to low operating rates of tanks, which hampers efficient processing of substrates.
Innovation Solution
A substrate processing module with two transport units, each equipped with a chuck that can move up and down and transfer substrates between tanks, allowing continuous operation and increased tank utilization by enabling substrate transfer between a cleaning tank and a chemical liquid tank.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single transport mechanism is used to move substrates between tanks, then the device structure is simple, but the throughput is limited due to low tank operating rates
Solution Approach 1:
The transport function is segmented into two independent transport units, each with its own chuck. One transport unit handles substrate supply to the first tank, while the other handles substrate transfer from the second tank. This segmentation allows parallel operation and eliminates the bottleneck of a single transport mechanism, thereby increasing throughput without creating a single point of failure.
Solution Approach 2:
A transfer mechanism positioned between the two tanks acts as an intermediary to exchange substrates between the first and second tanks. This intermediary component enables continuous processing by allowing one tank to be loaded while the other is being processed, improving the operating rate of both tanks and overall system throughput.
2Productivity
If tanks operate sequentially with single transport, then the device structure is simple, but tank operating rate is low due to empty periods
Solution Approach 1:
The dual transport units enable continuous substrate supply to both tanks simultaneously. While one tank is processing a substrate, the other tank can be loaded or prepared for the next substrate. This continuous operation eliminates idle time between substrate processing cycles, maximizing the operating rate of both tanks and reducing time loss.
3Productivity
If multiple transport units are added to increase throughput, then the productivity improves, but the device complexity increases
Solution Approach 1:
The two transport units are merged into a coordinated system where they work in parallel but share common control and spatial arrangement. By merging their functions into a unified dual-transport architecture, the system achieves high throughput while maintaining manageable complexity through shared infrastructure and synchronized operation.
Data Source
AI summary
A substrate processing module of a substrate processing device includes a first tank and a second tank and that are arranged in a first direction and in which a substrate can be disposed, and two first transport units and that transport the substrate. One first transport unit includes a second chuck that is movable up and down and is disposed in the second tank in a state of holding the substrate, and the other first transport unit includes a first chuck that is movable up and down and is disposed in the first tank in a state of holding the substrate. At least one of the second chuck and the first chuck is movable between a position above the second tank and a position above the first tank. The second chuck and the first chuck are configured to be able to transfer the substrate therebetween.