Dual Concentration Meter Processing Liquid Generator
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Solution Overview
Problem
The reliability of concentration measurement in existing processing liquid generators for semiconductor wafer processing is compromised due to reliance on a single concentration meter, which can lead to inconsistent peeling performance.
Innovation Solution
A dual-concentration meter system with separate processing liquid paths and valve mechanisms allows for independent concentration adjustments based on measurements from both meters, ensuring accurate and reliable processing liquid concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single concentration meter is used to measure the concentration of processing liquid, then the device complexity is reduced, but the reliability of concentration measurement deteriorates
Solution Approach 1:
The patent applies local quality by having different concentration meters measure different components (organic component concentration meter measures organic component concentration, water concentration meter measures water concentration) at different locations in the circulation tank, ensuring each measurement point has the appropriate measurement capability for its specific function
Solution Approach 2:
The patent implements beforehand cushioning by providing redundant concentration measurement capabilities with multiple concentration meters measuring different components. This ensures that if one measurement system fails or requires maintenance, the other measurement systems can continue to provide reliable concentration data, cushioning against measurement failures
2Reliability
If multiple concentration meters and separate processing liquid paths are introduced, then the reliability of concentration measurement is improved, but the device complexity increases
Solution Approach 1:
The circulation tank serves multiple functions: it stores processing liquid, allows concentration measurement of different components by multiple concentration meters, enables concentration adjustment by adding components or water, and circulates processing liquid to the substrate processing apparatus. This multi-functionality reduces the need for separate dedicated components for each function
Solution Approach 2:
The patent merges the concentration measurement and concentration adjustment functions within a single circulation tank system. The concentration meters and valve mechanisms work together in an integrated system where measurement data directly controls the addition of components or water to adjust concentration, combining multiple functions into a unified processing liquid generation system
Data Source
AI summary
According to one embodiment, a processing liquid generator capable of improving the reliability of the concentration of generated processing liquid is provided.A processing liquid generator that generates processing liquid having undergone concentration adjustment includes a processing liquid adjuster (11a), which adjusts the concentration of the processing liquid, a first processing liquid path P1, through which the processing liquid flows to the processing liquid adjuster (11a), a second processing liquid path P2, through which the processing liquid flows to the processing liquid adjuster 11a, a first concentration meter 201a, which measures the concentration of the processing liquid flowing through the first processing liquid path P1, the measured concentration being the concentration of a component involved in the concentration adjustment in the processing liquid adjuster (11a), a second concentration meter 201b, which measures the concentration of the processing liquid flowing through the second processing liquid path P2, the measured concentration being the concentration of a component that is involved in the concentration adjustment and should be measured with the first concentration meter 201a in terms of concentration, a first valve mechanism 120a/130a, which opens and closes the first processing liquid path P1, and a second valve mechanism 120b/130b, which opens and closes the second processing liquid path P2.