Nested Dual-Conduit Fluid Distributor for Uniform Deposition

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Solution Overview

Problem

Existing fluid distributors fail to provide uniform fluid distribution, leading to variations in layer thickness and stoichiometry, which affects the yield and functionality of optical devices like LCDs, OLEDs, and PDPs.

Innovation Solution

A fluid distributor design featuring a first conduit circumscribed by a second conduit, with specific ratios and orientations of orifices to ensure uniform mass-flow rates and well-mixed fluids, promoting consistent layer deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a simple single-conduit fluid distributor is used, then the device complexity is low, but the fluid distribution uniformity deteriorates

Engineering Contradiction:

Improveconduit structure complexityVSAvoidlayer thickness uniformity

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The single conduit is segmented into multiple parallel conduits (first conduit and second conduit), each with multiple orifices. This segmentation allows independent flow control and distribution optimization in each conduit, achieving uniform fluid distribution across the substrate while maintaining manageable complexity through modular design

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first conduit is positioned inside the second conduit, creating a nested dual-conduit structure. This nesting arrangement allows both conduits to work synergistically, with the inner conduit providing centralized distribution and the outer conduit providing peripheral distribution, achieving uniform coverage without requiring a complex multi-component assembly

Inventive Principle:

Principle #7Nested doll (Nesting)

2Device complexity

If conventional fluid distributors are used, then the device structure is simple, but the mixing of reactant gases deteriorates

Engineering Contradiction:

Improveconduit structure complexityVSAvoidfluid stoichiometry uniformity

Core Design Contradiction:

Device complexityVSStability of the object's composition

Solution Approach 1:

The conduit structure is designed with specific dimensions and orifice placements that promote preliminary mixing of reactant gases before they reach the substrate. The first conduit (with ratio ≥ 2) and second conduit (with ratio ≥ 0.5) create controlled flow patterns that ensure thorough mixing occurs within the conduit system itself, delivering well-mixed fluids to the deposition zone

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Different regions of the fluid distributor are designed with different properties: the first conduit has a higher area ratio (≥ 2) for centralized mixing, while the second conduit has a lower area ratio (≥ 0.5) for peripheral distribution. This local differentiation ensures optimal mixing occurs where needed while maintaining overall system simplicity

Inventive Principle:

Principle #3Local quality

3Productivity

If nonuniform fluid distribution is used, then the deposition process is faster, but the deposition yield deteriorates

Engineering Contradiction:

Improvedeposition speedVSAvoiddeposition yield rate

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The dual-conduit design with specific area ratios creates equipotential flow distribution across the substrate surface. By optimizing the first conduit area ratio to ≥ 2 and the second conduit area ratio to ≥ 0.5, the system ensures uniform mass flow rates at all orifices, eliminating flow potential differences that would cause nonuniform deposition and reducing defects that lower yield

Inventive Principle:

Principle #12Equipotentiality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves substantially uniform thickness and stoichiometry in deposited layers, enhancing deposition yield and device performance by maintaining steady state pressure distribution and effective mixing of reactant gases.

Implementation Method 1

A fluid distributor comprises a first conduit that can extend along a first elongated axis and a second conduit that may circumscribe the first conduit. The first conduit can comprise a first flow area comprising a cross-sectional area taken perpendicular to the first elongated axis. Also, the first conduit can comprise a first plurality of orifices comprising a first combined cross-sectional flow area. A first ratio of the first cross-sectional area to the first combined cross-sectional flow area can be about 2 or more.

Methodology Applied

Scientific EffectFluid distribution through orifices:

Implementation Method 2

Methodology Applied

Scientific EffectPressure distribution: Pressure Gradient

Data Source

PatentUS11338257B2Methods and apparatus comprising a first conduit circumscribed by a second conduit

Publication Date: 2022.05.24 CORNING INC

AI summary

A fluid distributor comprises a first conduit extending along a first elongated axis and a second conduit circumscribing the first conduit. A first area comprises a cross-sectional flow area of the first conduit taken perpendicular to the first elongated axis. The first conduit comprises a first plurality of orifices comprising a first combined cross-sectional area. The second conduit comprises a second plurality of orifices comprising a second combined cross-sectional area. A first ratio of the first area to the first combined cross-sectional area can be about 2 or more. A second ratio of the first combined cross-sectional area to the second combined cross-sectional area can be about 2 or more. An angle between a direction of an orifice axis of a first orifice of the first plurality of orifices and a direction of an orifice axis of a first orifice of the second plurality of orifices can be from about 45° to 180°.