Dual-Confocal Spectroscopic Measurement for Surface Displacement
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Solution Overview
Problem
Existing spectroscopic measurement devices using a single confocal detector have low detection sensitivity to changes in a sample's physical properties due to displacement from the in-focus position, particularly when a surface is displaced by energy application.
Innovation Solution
A spectroscopic measurement device employing two confocal detectors to detect electromagnetic waves reflected by a sample, with a calculation unit to analyze the outputs and improve detection sensitivity to changes in physical properties like expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single confocal detector is used, then the device complexity is reduced, but the detection sensitivity to surface displacement is low
Solution Approach 1:
The detection function is segmented into two separate confocal detectors, each independently measuring light amount changes. This segmentation allows the system to overcome the limitation of a single detector by distributing the detection task across multiple sensors, thereby improving overall detection sensitivity to surface displacement caused by thermal expansion.
Solution Approach 2:
The outputs from two confocal detectors are merged and processed by a calculation unit that computes the average of both detection results. This merging approach combines the detection capabilities of multiple sensors to achieve higher measurement precision while maintaining system manageability through centralized data processing.
2Measurement precision
If the surface of the sample is displaced from the in-focus position, then the spatial resolution is maintained, but the detected light amount changes minimally
Solution Approach 1:
The system changes the detection parameter from relying on large light amount changes to detecting subtle light amount variations through multiple detectors. By using two confocal detectors and averaging their outputs, the system can detect minimal light amount changes that occur when the sample surface displaces from the in-focus position, thereby maintaining measurement precision despite reduced signal magnitude.
3Measurement precision
If infrared ray is used for analysis, then molecular vibration analysis is achieved, but the spatial resolution is limited to 10 μm
Solution Approach 1:
A visible light laser is introduced as an intermediary probe to measure thermal expansion caused by infrared irradiation. The visible light laser has a much shorter wavelength than infrared, enabling high spatial resolution detection (1 μm or less) of surface displacement, while the infrared laser continues to provide the energy for molecular vibration analysis. This intermediary approach allows simultaneous achievement of both molecular analysis and high spatial resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances detection sensitivity to changes in physical properties of a sample subjected to energy application, such as thermal expansion, while maintaining high spatial resolution and reducing the impact of surface unevenness and light intensity variations.
Implementation Method 1
a change in a physical property value such as expansion of a sample to which energy is applied by an infrared ray
Implementation Method 2
an objective lens configured to focus the electromagnetic wave in the predetermined region
Implementation Method 3
two confocal detectors configured to detect the electromagnetic wave reflected by the sample
Data Source
AI summary
Provided is a spectroscopic measurement device capable of improving detection sensitivity to a change in a physical property value such as expansion of a sample to which energy is applied by an infrared ray or the like. The spectroscopic measurement device includes: a stage on which a sample is to be placed; an energy source configured to generate an energy beam to be emitted to a predetermined region of the sample; an electromagnetic wave source configured to generate an electromagnetic wave to be emitted to the sample; an objective lens configured to focus the electromagnetic wave in the predetermined region; two confocal detectors configured to detect the electromagnetic wave reflected by the sample; and a calculation unit configured to calculate, based on each of outputs of the confocal detectors, a change in a physical property value of the sample when the energy beam is emitted to the predetermined region.