Dual-Cover Semiconductor Test System for EMI Measurement Precision

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Solution Overview

Problem

Current semiconductor device testing methods lack the precision and reliability needed to effectively evaluate electromagnetic interference (EMI) characteristics, particularly in ensuring the quality and reliability of semiconductor devices during the fabrication process.

Innovation Solution

A semiconductor device test system and method utilizing a dual-cover setup with differently arranged openings for test probes, allowing for overlapping test data from first and second test processes to enhance reliability and precision without additional soldering or thermal damage, using a body with pogo-pins and a test board to electrically connect the device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single cover with fixed opening array is used for testing, then the testing process is simple, but the measurement precision and reliability of EMI characteristics are insufficient

Engineering Contradiction:
ImproveEMI testing precisionVSAvoidtest system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The test system is segmented into multiple covers (first cover and second cover) each with different opening arrays. This segmentation allows independent optimization of each cover's opening configuration to achieve comprehensive EMI testing precision without requiring a single complex all-purpose cover design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically switches between different covers with different opening arrays depending on the specific testing requirements. This dynamic configuration enables the system to adapt to various EMI testing scenarios, improving measurement precision while maintaining operational simplicity through selective usage of appropriate covers.

Inventive Principle:
Principle #15Dynamics

2Reliability

If traditional testing methods are used, then the testing process is straightforward, but thermal damage occurs due to additional soldering requirements

Engineering Contradiction:
Improvedevice reliabilityVSAvoidthermal damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The testing method extracts the EMI measurement function from the traditional soldering-based testing process. By using covers with specifically designed opening arrays that accommodate test probes without requiring soldering, the system eliminates thermal damage while maintaining reliable EMI characterization capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The covers with different opening arrays serve as intermediaries between the test probes and the semiconductor device. These covers enable electrical connection and EMI testing without direct soldering contact, thereby preventing thermal damage to the device while ensuring reliable testing through the intermediary coupling structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If test probes are positioned far from the device, then the testing setup is easy, but the average distance between test regions increases reducing testing effectiveness

Engineering Contradiction:
Improvetesting easeVSAvoidEMI measurement precision
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

Different covers are designed with locally optimized opening arrays positioned at specific locations relative to the device. This local quality optimization ensures that test probes are positioned at optimal distances from the device for EMI measurement precision, while the overall testing setup remains easy through standardized cover designs.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The system resolves the distance contradiction by introducing a dimensional solution through multiple cover options with different opening arrays arranged in different spatial configurations. This allows selection of the optimal probe-to-device distance dimension while maintaining ease of operation through standardized mounting interfaces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11137435B2System and method of testing a semiconductor device and method of fabricating the semiconductor device
Publication Date: 2021.10.05 SAMSUNG ELECTRONICS CO LTD
  • US11137435B2 patent drawing
  • US11137435B2 patent drawing
  • US11137435B2 patent drawing

AI summary

A semiconductor device test system may include a body providing an internal space, in which a test device is loaded, and a cover coupled to the body to cover the internal space. The cover may include a first cover including first openings two-dimensionally arranged and a second cover including second openings two-dimensionally arranged. An arrangement of the first openings may be different from an arrangement of the second openings.