Dual-Cup Processing Cup Liquid Re-Adherence Prevention
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Solution Overview
Problem
Existing rotary substrate processing apparatuses fail to reliably prevent processing liquids from re-adhering to substrates after splashing, despite the use of gas collectors to trap returning air flows.
Innovation Solution
A processing cup design featuring a first cup with a collection space and a second cup with a scatter capturing space, where the distance between the cup members gradually reduces outward, creating a clearance that collects and directs splashed liquids away from the substrate, ensuring they do not re-adhere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a gas collector is provided to trap returning air flow, then the re-adherence of processing liquid is suppressed, but the processing liquid cannot be reliably prevented from adhering to the substrate again
Solution Approach 1:
The processing cup is divided into multiple functional regions: an inner cup with a collection space for initial liquid collection, an outer cup with a scatter capturing space for secondary capture, and a gas collector for air flow management. Each segment performs a specific function in the liquid containment sequence, improving reliability through distributed functionality rather than a single complex structure.
Solution Approach 2:
The patent introduces a vertical dimension to liquid containment by creating stacked collection spaces (inner cup collection space, scatter capturing space in outer cup) arranged vertically. This multi-level vertical arrangement allows liquids to be captured at different heights and stages, preventing re-adherence more effectively than a single horizontal plane could provide.
2Reliability
If the distance between first upper surface and first lower surface is gradually reduced outward, then processing liquid is effectively collected and led outward, but the clearance at outer peripheries allows liquid to pass through and potentially re-adhere
Solution Approach 1:
The scatter capturing space in the outer cup acts as an intermediary zone between the inner cup collection space and the external environment. Liquids that pass through the clearance of the inner cup are intercepted and captured in this intermediate scatter capturing space, preventing them from reaching the substrate and causing re-adherence.
Solution Approach 2:
The harmful factor (splashed liquid) is extracted and removed from the potential re-adherence path by directing it into the scatter capturing space of the outer cup. The inclined surfaces and clearance design actively extract liquids from the inner cup region and relocate them to the outer cup's capture zone, isolating them from the substrate.
3Productivity
If processing is performed at high rotation speed with large liquid volumes, then productivity is improved, but liquid splashing and re-adherence risk increases
Solution Approach 1:
The nested cup structure with multiple collection spaces provides pre-positioned containment zones that cushion and absorb liquid splashes before they can reach the substrate. The collection space in the inner cup and the scatter capturing space in the outer cup act as buffer zones, accommodating liquids even during high-speed rotation with large liquid volumes.
Solution Approach 2:
The inner cup is nested within the outer cup, creating a hierarchical containment structure. The inner cup handles primary liquid collection, while the outer cup provides an additional layer of containment for scattered liquids. This nested arrangement provides progressive containment that remains effective even under high centrifugal forces during fast rotation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively captures and prevents processing liquids from re-adhering to the substrate, even during high-speed rotation, by utilizing a dual-cup configuration with strategically inclined surfaces and a larger scatter capturing space to manage splashed liquids efficiently.
Implementation Method 1
the processing liquid that has splashed outward from a substrate by a centrifugal force developed during high-speed rotation
Implementation Method 2
a first collection space that collects a processing liquid is formed between the first upper surface and the first lower surface
Implementation Method 3
a clearance is formed between the first upper surface and the first lower surface at outer peripheries of the first and second members, and the second cup is configured to form a scatter capturing space that allows the scattering of the processing liquid that has passed through the clearance
Data Source
AI summary
A substrate is surrounded by an inner cup and an outer cup. A distance between an upper surface of an inner cup lower portion and a lower surface of an inner cup upper portion of the inner cup is gradually reduced outward from an outer periphery of the substrate. A clearance is formed between the upper surface of the inner cup lower portion and the lower surface of the inner cup upper portion at outer peripheries of the inner cup lower portion and the inner cup upper portion. A collection space is formed between the upper surface of the inner cup lower portion and the lower surface of the inner cup upper portion. A scatter capturing space that allows a processing liquid that has passed through the clearance to scatter and captures the scattering processing liquid is formed by an outer cup. An upper portion and an outer periphery of the scatter capturing space are covered by a lower surface and an inner side surface of the outer cup, respectively. The processing liquid that has passed through the clearance is led to the inner side surface by the lower surface of the outer cup.