Dual Detector Liquid Leakage Control for Semiconductor Substrate Processing

Solution Overview

Problem

Conventional methods for preventing water leakage in semiconductor manufacturing apparatuses often result in frequent power cutoffs to the entire substrate processing apparatus, leading to substrate discarding, as they are not stringent enough to avoid operator danger while minimizing electric shock risks.

Innovation Solution

A substrate processing apparatus with a dual detection system, where a first detector alerts for a warning state and a second detector triggers an immediate power cutoff, allowing for controlled shutdown and minimizing substrate loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single detector is used to detect liquid leakage, then the device complexity is reduced, but the reliability of preventing electric shock risks deteriorates

Engineering Contradiction:

Improvedetection system complexityVSAvoidelectric shock prevention reliability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The detection system is segmented into two distinct detectors with different functions: a first detector that triggers warnings and a second detector that triggers immediate power cutoff. This segmentation allows each detector to be optimized for its specific detection threshold, improving overall reliability while maintaining manageable complexity through clear functional division.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different detection thresholds and response characteristics are applied at different locations within the liquid leakage collector. The first detector uses a lower threshold for early warning, while the second detector uses a higher threshold for critical shutdown, creating local quality differences that enhance overall system reliability.

Inventive Principle:

Principle #3Local quality

2Reliability

If a single detector with high sensitivity is used, then the reliability of detecting liquid leakage is improved, but the productivity deteriorates due to frequent false alarms and substrate discarding

Engineering Contradiction:

Improveliquid leakage detection reliabilityVSAvoidsubstrate processing efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The detection system is segmented into two distinct detectors with different functions: a first detector that triggers warnings and a second detector that triggers immediate power cutoff. This segmentation allows each detector to be optimized for its specific detection threshold, improving overall reliability while maintaining manageable complexity through clear functional division.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first detector performs preliminary detection at a lower threshold to provide early warning before critical leakage occurs. This preliminary action allows operators to address potential issues before they escalate to substrate-damaging levels, thereby maintaining productivity while ensuring reliability.

Inventive Principle:

Principle #10Preliminary action

3Reliability

If a single detector with low sensitivity threshold is used, then the reliability of early liquid leakage detection is improved, but the productivity deteriorates due to frequent false alarms causing power cutoffs

Engineering Contradiction:

Improveearly liquid leakage detection reliabilityVSAvoidsubstrate processing efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The detection system is segmented into two distinct detectors with different functions: a first detector that triggers warnings and a second detector that triggers immediate power cutoff. This segmentation allows each detector to be optimized for its specific detection threshold, improving overall reliability while maintaining manageable complexity through clear functional division.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first detector performs preliminary detection at a lower threshold to provide early warning before critical leakage occurs. This preliminary action allows operators to address potential issues before they escalate to substrate-damaging levels, thereby maintaining productivity while ensuring reliability.

Inventive Principle:

Principle #10Preliminary action

4Reliability

If immediate power cutoff is triggered by any liquid leakage detection, then the reliability of preventing electric shock is improved, but the productivity deteriorates due to substrate discarding

Engineering Contradiction:

Improveelectric shock prevention reliabilityVSAvoidsubstrate processing efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The detection system is segmented into two distinct detectors with different functions: a first detector that triggers warnings and a second detector that triggers immediate power cutoff. This segmentation allows each detector to be optimized for its specific detection threshold, improving overall reliability while maintaining manageable complexity through clear functional division.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The first detector performs preliminary detection at a lower threshold to provide early warning before critical leakage occurs. This preliminary action allows operators to address potential issues before they escalate to substrate-damaging levels, thereby maintaining productivity while ensuring reliability.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively prevents electric shock risks while reducing unnecessary power cutoffs, thereby minimizing substrate discarding and ensuring operator safety.

Implementation Method 1

a first detector provided within the liquid leakage collector, and configured to detect the liquid

Methodology Applied

Scientific EffectLiquid detection:

Implementation Method 2

a second detector provided at a position higher than the first detector within the liquid leakage collector, and configured to detect the liquid

Methodology Applied

Scientific EffectLiquid detection:

Data Source

PatentUS11177118B2Substrate processing apparatus and control method therefor

Publication Date: 2021.11.16 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus configured to perform a preset processing on a substrate includes a pipe through which a liquid flows; a liquid leakage collector configured to receive the liquid leaking from the pipe; a first detector provided within the liquid leakage collector, and configured to detect the liquid; a second detector provided at a position higher than the first detector within the liquid leakage collector, and configured to detect the liquid; an indicator configured to notify liquid leakage information indicating a liquid leakage; a power supply configured to perform a power feed to the substrate processing apparatus; and a controller configured to control the indicator to notify the liquid leakage information based on a detection result of the first detector, and control the power supply to stop the power feed to the substrate processing apparatus based on a detection result of the second detector.