Dual Distance Measurement Units for Vibration-Compensated Shape Accuracy
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Solution Overview
Problem
Existing shape measurement devices struggle to achieve high accuracy due to vibrations of both the measurement object and the measurement unit itself, as they do not effectively counteract the effects of these vibrations on the measurement results.
Innovation Solution
The device employs first and second distance measurement units positioned opposed to each other with the measurement object in between, measuring displacements of these units to correct the distance measurements and obtain the shape of the object, thereby reducing the impact of vibrations on the measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single distance measurement unit is used to measure the shape of the measurement object, then the device complexity is reduced, but the measurement precision deteriorates due to vibrations of the measurement unit itself
Solution Approach 1:
The measurement system is divided into multiple independent distance measurement units (first and second units) positioned at different locations. Each unit measures distance independently, and their results are combined through arithmetic operations to obtain the final shape measurement, thereby reducing the impact of individual unit vibrations
Solution Approach 2:
Displacement measurement units are introduced to detect the vibration displacements of the distance measurement units in real-time. These displacement measurements are fed back into the calculation process to correct the distance measurements, compensating for the effects of measurement unit vibrations on measurement precision
2Measurement precision
If displacement measurement units are added to correct for vibrations, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
Displacement measurement units serve as intermediary devices that specifically measure the vibration displacement of the distance measurement units. These intermediaries provide correction data that is integrated into the final shape calculation, enabling vibration compensation without requiring complete system redesign
Solution Approach 2:
The displacement measurement results are merged with the distance measurement results through arithmetic operations in the shape measurement unit. By combining multiple measurement types (distance and displacement) into a unified calculation process, the system achieves vibration compensation while maintaining operational efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more accurate shape measurement by equally affecting displacement-caused errors across both measurement units, resulting in higher precision in measuring the shape of the object, particularly for sub-nanometer scale measurements.
Implementation Method 1
first and second distance measurement units which measure a distance to a measurement object
Implementation Method 2
first and second displacement measurement units which measure a displacement of the first and second distance measurement units
Data Source
AI summary
A shape measurement device and a shape measurement method according to the present invention measure, for first and second distance measurement units which are disposed so as to be opposed to each other with a measurement object to be measured interposed therebetween and each measure a distance to the measurement object, first and second displacements of the first and second distance measurement units in an opposition direction, and obtain, as a shape of the measurement object, a thickness of the measurement object in the opposition direction, the thickness being corrected with the measured first and second displacements, based on first and second distance measurement results measured by the first and second distance measurement units, respectively.