Dual-End-Effector Robot Retraction Within Rectangular Mainframes
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Solution Overview
Problem
Existing robot apparatuses struggle to maintain a constant pitch between dual end effectors in both extended and retracted positions, which can exceed the sweep diameter specifications of a rectangular mainframe, especially when operating in dual substrate handling modes.
Innovation Solution
The robot apparatus is designed with a lower shoulder and upper shoulder that rotate about a first rotational axis, with arms and forearms that allow for adjustable pitch and independent rotation, enabling the end effectors to be extended into process chambers or load lock chambers while maintaining a specific pitch and retracting into the mainframe without exceeding the sweep diameter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the robot apparatus uses a conventional design with fixed arm lengths and single-pitch configuration, then the structure is simple, but it cannot maintain constant pitch between end effectors when retracting from process chambers with different pitch configurations
Solution Approach 1:
The robot apparatus employs dynamic arm length configuration where the first and second forearms have different lengths to accommodate varying pitch requirements. The arms can dynamically adjust their positions and orientations through multiple rotational joints to maintain the required pitch between end effectors when retracting from process chambers with different pitch configurations, resolving the contradiction between adaptability and structural simplicity.
Solution Approach 2:
The robot apparatus is divided into multiple segments (first arm, second arm, first forearm, second forearm) with independent rotational capabilities. This segmentation allows each arm to independently adjust its position and orientation, enabling the system to maintain constant pitch between end effectors while retracting from chambers with different pitch configurations, thus achieving adaptability without excessive overall complexity.
2Productivity
If the robot apparatus extends dual end effectors into process chambers with large pitch separation, then it can access multiple processing chambers simultaneously, but the end effectors may collide with mainframe walls during retraction
Solution Approach 1:
The robot apparatus utilizes multi-dimensional motion through five rotational axes (three for arm positioning, two for forearm orientation) to navigate the end effectors through complex trajectories. This dimensional freedom allows the arms to retract in a coordinated manner that maintains pitch separation while avoiding collision with mainframe walls, enabling simultaneous access to multiple chambers without harmful interactions.
Solution Approach 2:
The different-length forearms act as intermediary elements that mediate between the fixed mainframe structure and the moving end effectors. By having the first and second forearms with different lengths, the system can create sufficient clearance during retraction while maintaining the required pitch between end effectors, preventing wall collisions while preserving processing throughput.
3Adaptability or versatility
If the robot apparatus uses equal-length forearms, then the structure is symmetric and simpler to manufacture, but it cannot independently adjust pitch for different process chamber configurations
Solution Approach 1:
The robot apparatus deliberately employs asymmetric design where the first and second forearms have different lengths. This asymmetry enables the system to independently adjust the pitch between end effectors when retracting from process chambers with different pitch configurations. While asymmetric structures can be slightly more complex to manufacture, the design allows for standardized components with varying dimensions that can be manufactured using conventional processes, balancing manufacturability with functional adaptability.
Data Source
AI summary
A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.