Dual Elastic Modulus Support Mechanism for Furnace Cover Sealing
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Solution Overview
Problem
Conventional support mechanisms for semiconductor substrate processing apparatuses face challenges in achieving both elastic abutment of the cover on the manifold and maintaining airtightness, particularly when handling large-diameter wafers, as they often require high elastic moduli to secure sealing, which can lead to non-elastic contact and reduced throughput.
Innovation Solution
A support mechanism incorporating a first elastic body with a first elastic modulus and a second elastic body with a higher elastic modulus, where the reaction force from the first elastic body is applied when the cover abuts the furnace opening, and the combined reaction force from both elastic bodies is applied after abutment, allowing for elastic contact and secure sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a high elastic modulus is used in the support mechanism to secure sealing, then airtightness is improved, but elastic abutment is lost and throughput decreases
Solution Approach 1:
The support mechanism is divided into two separate elastic bodies with different elastic moduli. The first elastic body (softer) provides elastic abutment during wafer loading/unloading operations, while the second elastic body (harder) provides strong sealing force during heat treatment. This segmentation allows each component to optimize its function without compromising the other.
Solution Approach 2:
Different parts of the support mechanism have different elastic moduli tailored to their specific functions. The first elastic body has a lower elastic modulus suitable for elastic contact during frequent operational movements, while the second elastic body has a higher elastic modulus for maintaining airtightness during processing. This local differentiation resolves the contradiction between elasticity and sealing strength.
2Strength
If a single elastic body with high elastic modulus is used, then sealing force is improved, but elastic contact during abutment is reduced
Solution Approach 1:
The support mechanism separates the sealing function from the elastic contact function by using two distinct elastic bodies. The first elastic body handles elastic contact during operational movements with appropriate softness, while the second elastic body provides the necessary sealing force with higher stiffness. This segmentation eliminates the need to compromise between these conflicting requirements in a single component.
Solution Approach 2:
The system uses two elastic bodies with different elastic modulus parameters optimized for their respective functions. The first elastic body has a lower elastic modulus for elastic deformability during abutment, while the second has a higher elastic modulus for strong sealing. This parameter differentiation allows both elastic contact and strong sealing to coexist.
3Productivity
If the cover is moved up quickly to improve throughput, then productivity is improved, but proper elastic abutment and sealing are compromised
Solution Approach 1:
The dual elastic body structure allows the system to tolerate faster movement speeds because the first elastic body absorbs dynamic shocks during quick abutment operations, while the second elastic body ensures sealing quality is maintained. This segmentation provides a buffer that allows higher throughput without compromising sealing.
Solution Approach 2:
The first elastic body acts as a cushion that absorbs the impact of quick cover movements before they reach the sealing interface. This beforehand cushioning protects the sealing system from damage due to high-speed operations, enabling faster throughput while maintaining sealing integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables elastic abutment of the cover on the manifold while maintaining airtightness, improving the sealing process efficiency and throughput by controlling the timing and application of reaction forces.
Implementation Method 1
a first elastic body having a first elastic modulus; and a second elastic body having a second elastic modulus larger than the first elastic modulus. A reaction force in relation to the first elastic body is applied to the cover when the cover abuts on the furnace opening
Implementation Method 2
a reaction force in relation to the first elastic body and the second elastic body is applied to the cover after the cover abuts on the furnace opening by being moved up by the elevating unit
Data Source
AI summary
The present disclosure provides a support mechanism for supporting a cover that performs sealing of a furnace opening of a heat treatment furnace or release the sealing by being moved up or down by an elevating unit. The support mechanism includes a first elastic body having a first elastic modulus; and a second elastic body having a second elastic modulus larger than the first elastic modulus. A reaction force in relation to the first elastic body is applied to the cover when the cover abuts on the furnace opening by being moved up by the elevating unit, and a reaction force in relation to the first elastic body and the second elastic body is applied to the cover after the cover abuts on the furnace opening by being moved up by the elevating unit.