Dual Electron Injector Merging Unit for Free Electron Laser
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Solution Overview
Problem
Existing electron injector systems for free electron lasers are prone to downtime due to injector failures and require frequent maintenance, disrupting the operation of lithographic apparatuses that rely on these systems for precise pattern formation on substrates.
Innovation Solution
The implementation of a dual injector arrangement with a merging unit that allows for operation with either injector, enabling continued electron beam production even if one injector fails, and allows for maintenance without halting the system. This setup includes steering units to manage electron beam paths and focusing units to maintain charge distribution quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single electron injector is used, then the device complexity is low, but the reliability deteriorates due to downtime from injector failures
Solution Approach 1:
The single injector is divided into two separate injectors (first injector and second injector), each capable of independently providing electron beams. This segmentation allows one injector to be maintained while the other continues operation, resolving the contradiction between reliability and complexity by distributing the functional load across multiple independent units.
Solution Approach 2:
The system changes the operational parameters by switching between different injector configurations (first injector only, second injector only, or both together). This parameter change enables flexible operation where the injectors can be used individually or in combination, maintaining reliability while managing complexity through parameter-based control.
2Reliability
If a dual injector arrangement is implemented, then the reliability improves through redundancy, but the device complexity increases due to additional components
Solution Approach 1:
Two separate electron beams from the first and second injectors are merged into a single combined electron beam using a merging unit. This merging approach allows the system to maintain reliability through redundancy while managing complexity by combining the beams back into one unified output that can be processed by existing downstream components.
Solution Approach 2:
Steering units act as intermediaries between the dual injectors and the merging unit, controlling the paths of electron beams from each injector. These intermediary components enable precise control of beam trajectories and merging operations, resolving the contradiction by providing necessary control functionality while maintaining system modularity.
3Ease of repair
If maintenance is performed on an injector, then the ease of repair improves, but the productivity deteriorates due to system downtime
Solution Approach 1:
The dual injector arrangement with merging capability ensures continuous electron beam production during maintenance. While one injector is being maintained, the other injector continues to provide electron beams through the merging unit, maintaining productivity without interruption and enabling ease of repair through uninterrupted operation of the overall system.
4Productivity
If electron bunches are produced at high repetition rate, then the productivity increases, but the reliability worsens due to increased stress on injector components
Solution Approach 1:
The high repetition rate electron beam production is segmented across two injectors, with each injector operating at a lower individual repetition rate. This segmentation reduces the stress and wear on each individual injector component while maintaining the overall high productivity through combined output from both injectors via the merging unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures continuous operation of free electron lasers and lithographic apparatuses by providing a redundant electron beam source, reducing downtime and extending the operational lifespan of injector components through efficient maintenance strategies.
Implementation Method 1
directing a beam of radiation to be incident on a region of a photocathode thereby causing the photocathode to emit a beam of electrons
Implementation Method 2
a steering unit operable to apply a force to the beam of electrons to alter its trajectory
Data Source
AI summary
A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity.