Dual-End-Effector Robot Arm for Precise Wafer Transfer
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Solution Overview
Problem
Material-handling robots in semiconductor wafer processing systems face challenges in efficiently moving multiple end-effectors along complex paths to access various stations while maintaining precise alignment and avoiding obstacles.
Innovation Solution
A robot design featuring a controller, robot drive, and a robot arm with upper and forearm links, utilizing transmission belt arrangements with non-circular pulleys to coordinate movement and rotation of end-effectors, allowing for precise movement and alignment of end-effectors along straight lines into substrate processing modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a robot arm with multiple end-effectors is used to access various stations, then the productivity is improved, but the device complexity increases due to coordination requirements
Solution Approach 1:
The patent combines multiple end-effectors (first and second end-effectors) onto a single robot arm structure, allowing them to be controlled by a unified coordination system. This merging approach enables simultaneous operation of multiple end-effectors while reducing overall system complexity compared to using separate robotic systems for each end-effector.
Solution Approach 2:
The robot arm is designed with universal functionality to handle multiple end-effectors that can perform different operations. The transmission system and control mechanism are configured to accommodate various end-effector types and movements, making the system adaptable to different material handling tasks while maintaining a single integrated structure.
2Manufacturing precision
If transmission belt arrangements with non-circular pulleys are used to coordinate movement, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The patent employs non-circular pulleys in the transmission belt arrangements, utilizing asymmetric geometries to achieve precise motion control. The non-circular shapes of the pulleys create variable transmission ratios that enable accurate positioning and alignment of end-effectors along complex paths, transforming the precision requirement into the geometric design of the transmission components.
Data Source
AI summary
An apparatus including a controller; a robot drive; a robot arm connected to the robot drive, where the robot arm has links including an upper arm, a first forearm connected to a first end of the upper arm, a second forearm connected to a second opposite end of the upper arm, a first end effector connected to the first forearm and a second end effector connected to the second forearm; and a transmission connecting the robot drive to the first and second forearms and the first and second end effectors. The transmission is configured to rotate the first and second forearms relative to the upper arm and rotate the first and second end effectors on their respective first and second forearms. The upper arm is substantially rigid and movement of the upper arm by the robot drive moves both the first and second forearms in opposite directions.