Dual-Flexure SLM Mount for Micron-Level Alignment

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Solution Overview

Problem

In spatial light modulator systems, the shrinkage of ultraviolet (UV) curable adhesives during curing causes misalignment of spatial light modulators (SLMs) by up to 15 μm, making micron-level adjustments challenging due to the coarse screw thread pitch, which is inadequate for precise alignment of small pixel sizes.

Innovation Solution

A flexure-based adjustment mechanism is introduced, where a first flexure with a lower modulus of elasticity and a second flexure with a higher modulus of elasticity are used in conjunction with adjustment screws, allowing for precise movement of the adjustable plate by compressing the flexures in proportion to their elasticity, enabling finer adjustments with less than one turn of the screw.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If UV-curable adhesives are used to mount SLMs, then the mounting process is simplified and fast, but the adhesive shrinkage during curing causes misalignment of SLMs by up to 15 μm

Engineering Contradiction:
Improvemounting process simplicityVSAvoidSLM alignment precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent introduces an intermediary adjustment mechanism consisting of a flexure plate and adjustment screws positioned between the adhesive mounting system and the SLM. This intermediary structure allows the SLM to be initially mounted using simple adhesive bonding, then subsequently adjusted to precise alignment using the mechanical adjustment screws, thereby resolving the contradiction between easy mounting and precise alignment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs a dynamic adjustment mechanism where the SLM mounting position can be modified after initial adhesive bonding. The adjustment screws enable dynamic repositioning of the SLM on the flexure plate, allowing the system to transition from a static adhesive-bonded state to a dynamically adjustable state for achieving precise alignment.

Inventive Principle:
Principle #15Dynamics

2Device complexity

If coarse screw thread pitch is used for adjustment, then the adjustment mechanism is simpler, but micron-level adjustments are challenging and alignment precision is insufficient

Engineering Contradiction:
Improveadjustment mechanism simplicityVSAvoidalignment precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent replaces the direct mechanical screw-to-SLM adjustment system with a flexure-based mechanical system. The adjustment screws rotate a flexure plate rather than directly moving the SLM, substituting a simple rotational mechanical action for a complex linear positioning mechanism, thereby achieving fine alignment precision while maintaining adjustment mechanism simplicity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the mechanical parameter of the adjustment system by using a flexure plate with specific elastic properties. The flexure plate converts small rotational movements of the adjustment screws into amplified linear displacements of the SLM, effectively changing the displacement parameter from the screw rotation to the SLM position, enabling micron-level adjustments with simple screw threads.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If adjustment mechanism moves the SLM directly, then the adjustment is more direct, but the SLM moves more than the adjustment mechanism, making precise control difficult

Engineering Contradiction:
Improveadjustment directnessVSAvoidposition control precision
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent introduces the flexure plate as an intermediary element between the adjustment screws and the SLM. The flexure plate acts as a mechanical transformer that decouples the adjustment mechanism's movement from the SLM's movement, allowing the adjustment screws to move a larger distance while the SLM moves a smaller, more precisely controlled distance.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The flexure plate changes the displacement parameter relationship between the adjustment mechanism and the SLM. By utilizing the elastic deformation of the flexure plate, a small rotation of the adjustment screws produces a proportionally smaller but precisely controlled linear displacement of the SLM, improving position control precision while maintaining ease of operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This mechanism allows for accurate micron-level adjustments of SLMs, reducing misalignment and improving image quality by enabling precise alignment of SLMs with smaller pixel sizes, such as 5 μm pitch, through the differential compression of flexures, facilitating accurate pixel alignment.

Implementation Method 1

a first flexure on a first surface of the adjustable plate, the first flexure having a first modulus of elasticity and a second flexure on a second surface of the adjustable plate, the second surface of the adjustable plate opposite to the first surface of the adjustable plate, and the second flexure having a second modulus of elasticity

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS11747588B2Flexure device
Publication Date: 2023.09.05 TEXAS INSTRUMENTS INC
  • US11747588B2 patent drawing
  • US11747588B2 patent drawing
  • US11747588B2 patent drawing

AI summary

Described examples include a device having a body. The device also has a first flexure on a first surface of the body, the first flexure having a first modulus of elasticity. The device has a second flexure on a second surface of the body, the second surface of the body opposite to the first surface of the body, and the second flexure having a second modulus of elasticity. The device also has a fixed member on a surface of the second flexure opposite to the first flexure. The device also has an adjustment device on a surface of the first flexure opposite to the second flexure.