Dual Fork Substrate Transport Apparatus for Film Deposition
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Solution Overview
Problem
The existing substrate transport apparatuses face challenges in supporting both substrates and spacer members with the same fork without interference, leading to increased fork thickness and larger intervals between substrates or spacer members, which affects efficient transport and processing in film deposition apparatuses.
Innovation Solution
A substrate transport apparatus and method that utilize a first fork for supporting substrates and a reversible second fork for supporting spacer members, allowing both to be handled with the same fork, reducing the intervals between accommodated substrates or spacer members by using grip modules on the same surface of the second fork to manage and transport them effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If the substrate supporting module and the spacer-member supporting module are arranged on one surface of the fork, then the fork thickness is reduced, but the substrate or spacer member may interfere with the supporting module during transport
Solution Approach 1:
The single fork structure is segmented into two separate forks: a upper fork with a substrate supporting module for holding substrates, and a lower fork with a spacer-member supporting module for holding spacer members. This segmentation allows each fork to be optimized for its specific function without interference, while both forks are coordinated by a single control unit that can independently control their movement and gripping actions
Solution Approach 2:
The control unit serves multiple functions by independently controlling both the upper fork and lower fork. It can control the gripping and release actions of both forks, coordinate their movement to transport substrates and spacer members separately or in combination, and manage the overall transport process without requiring separate control systems for each fork
2Reliability
If the substrate supporting module and the spacer-member supporting module are arranged on opposite surfaces of the fork, then interference between substrates and spacer members is prevented, but the fork thickness increases
Solution Approach 1:
The single fork structure is segmented into two separate forks: an upper fork with a substrate supporting module and a lower fork with a spacer-member supporting module. This vertical segmentation eliminates interference between substrates and spacer members while maintaining a compact overall structure through coordinated movement of the two forks
Solution Approach 2:
Instead of arranging supporting modules on opposite surfaces of a single fork (horizontal arrangement), the invention transitions to a vertical arrangement with upper and lower forks positioned at different heights. This dimensional change allows both modules to operate independently without interference while maintaining a compact footprint
3Reliability
If separate forks are used for substrates and spacer members, then interference is eliminated and transport reliability is improved, but the device complexity increases
Solution Approach 1:
The upper fork and lower fork are merged into a single integrated transport mechanism that operates under unified control. Both forks share common structural support, alignment mechanisms, and control systems, allowing them to function as coordinated units rather than completely independent systems, thereby reducing overall device complexity
Solution Approach 2:
The control unit is designed with universal functionality to manage both upper and lower forks. It can independently control gripping and release actions for each fork while also coordinating their combined operation, eliminating the need for separate control systems and reducing overall system complexity
Data Source
AI summary
A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates substrates and spacer members to transport a substrate or a spacer member between the accommodating part and the first fork. A first grip module is disposed on a first surface of the second fork to hold and support the substrate from an upward direction. A second grip module is disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.