Dual-Frequency Controller for Substrate Imaging Accuracy
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in accurately detecting and processing substrates while the stage is moving due to timing errors in light emission and imaging, leading to misregistration and positional deviations from the field of view.
Innovation Solution
A processing apparatus with a first controller operating at a first frequency to control the stage and a second controller operating at a higher frequency to generate precise commands for mark detection, ensuring accurate imaging and positioning of the substrate within the field of view, even during stage movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the stage moves to improve throughput, then productivity increases, but imaging accuracy deteriorates due to timing errors and mark deviation from field of view
Solution Approach 1:
The control system is divided into two independent controllers: a first controller that operates at a lower frequency for stage movement control, and a second controller that operates at a higher frequency for imaging command generation. This segmentation allows each controller to be optimized for its specific function, enabling accurate imaging during stage movement without compromising throughput.
Solution Approach 2:
The system dynamically adjusts the imaging command timing based on the real-time position of the stage. The second controller generates imaging commands at a higher frequency than the stage movement control frequency, allowing the system to adapt to changing positions and maintain accurate imaging throughout the movement process.
2Measurement precision
If imaging command timing is synchronized with stage movement, then measurement precision improves, but device complexity increases due to multiple controllers operating at different frequencies
Solution Approach 1:
The control system is divided into two independent controllers: a first controller that operates at a lower frequency for stage movement control, and a second controller that operates at a higher frequency for imaging command generation. This segmentation allows each controller to be optimized for its specific function, enabling accurate imaging during stage movement without compromising throughput.
Solution Approach 2:
The second controller acts as an intermediary between the stage movement control and the imaging system. It receives position information from the first controller and generates appropriately timed imaging commands, coordinating the two systems without requiring direct complex interaction between them.
Data Source
AI summary
A processing apparatus performs a predetermined process with respect to a substrate. The apparatus includes a driver configured to drive a stage that holds the substrate, a first controller configured to operate at a first frequency and control the driver, a second controller configured to operate at a second frequency higher than the first frequency and generate a command based on a position of the stage, and a device configured to perform one of the predetermined process in response to the command and a preparation process for the predetermined process.