Dual-Gain Pixel Elements for Wide Dynamic Range Microscopy

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Solution Overview

Problem

Particle beam microscopy image sensors face challenges in achieving a broad dynamic range to represent a wide range of incident particle beam signal magnitudes, limiting their imaging capabilities.

Innovation Solution

The development of pixel elements with a scintillator that generates an electromagnetic signal, a sensor to receive this signal, and a waveguide to convey it, featuring a radiation-sensitive element, a floating diffusion node, and a charge storage device, allowing operation in high-gain and low-gain modes with a calibrated total dynamic range based on the average photon conversion rate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a particle beam microscopy image sensor uses a conventional detector design, then the device structure is simple, but the dynamic range is limited and cannot represent a wide range of incident particle beam signal magnitudes

Engineering Contradiction:
Improvedynamic rangeVSAvoiddetector structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detector is divided into multiple pixel elements, each containing separate first and second charge storage regions with different charge capacities. This segmentation allows simultaneous measurement of both weak and strong signals within the same integration period, expanding the overall dynamic range without increasing system complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions within each pixel element are assigned different charge capacities - the first charge storage region has a smaller capacity for high-gain measurement of weak signals, while the second charge storage region has a larger capacity for low-gain measurement of strong signals. This local differentiation enables the detector to handle a wide range of signal magnitudes

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If the detector is designed to capture a wide dynamic range, then imaging capabilities are improved, but the device complexity increases

Engineering Contradiction:
Improveimaging capabilitiesVSAvoidpixel element structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Multiple charge storage regions with different capacities are merged within a single pixel element structure, sharing common components such as the radiation-sensitive element and readout circuitry. This merging approach achieves extended dynamic range and versatile imaging capabilities while minimizing the increase in device complexity through shared infrastructure

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Each pixel element is designed to perform multiple functions - it can measure both weak and strong particle beam signals within the same integration period by utilizing the different charge storage regions. This multi-functionality enhances imaging versatility without requiring separate detector systems for different signal conditions

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the dynamic range of particle beam microscopy image sensors, enabling them to accurately represent a wide range of signal magnitudes, significantly improving imaging capabilities.

Implementation Method 1

a scintillator configured to receive a particle beam and to generate an electromagnetic signal at an average photon conversion rate

Methodology Applied
Scientific EffectScintillation: Scintillation

Implementation Method 2

a waveguide configured to convey the electromagnetic signal from the scintillator to the sensor

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Implementation Method 3

The sensor comprises at least one pixel element configured to produce a high-gain charge signal and a low-gain charge signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20240153735A1Pixel elements, particle beam microscopes including the same, and associated methods
Publication Date: 2024.05.09 FEI CO
  • US20240153735A1 patent drawing
  • US20240153735A1 patent drawing
  • US20240153735A1 patent drawing

AI summary

Pixel elements and associated methods are disclosed herein. A pixel element can comprise a radiation-sensitive element configured to generate an electric charge, a floating diffusion node, a charge storage device, and an output stage configured to generate a charge signal. The pixel element is configured to operate in a high-gain mode and a low-gain mode and can have a total dynamic range that is at least 100,000:1. A method of operating a pixel element can comprise reading out a high-gain charge signal with the pixel element in a high-gain mode and reading out a low-gain charge signal with the pixel element in a low-gain mode. The reading out the low-gain charge signal comprises configuring a low-gain channel charge capacity of the pixel element such that a ratio of the low-gain channel charge capacity to a high-gain channel charge capacity is at least 30:1.