Dual-Hand Robot Substrate Transfer via Intermediate Holder
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Solution Overview
Problem
Existing robot systems in semiconductor manufacturing lack efficient methods to expand the carrying range of substrates without increasing the elevation range of the elevator mechanism, leading to space inefficiencies and limitations in facility design.
Innovation Solution
A robot system with a pair of hands supported by an arm mechanism that includes an elevator, allowing the hands to operate at different heights and utilizing a holder to transfer substrates, thereby reducing the required elevation range and increasing the carrying range without additional elevation mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the elevator's elevation range is increased to expand the carrying range of substrates, then the carrying range is improved, but the device complexity and space requirements increase
Solution Approach 1:
The robot system divides the substrate transfer function into two independent parts: a pair of hands for horizontal transfer and a holder for vertical positioning. This segmentation allows each component to have a reduced range of motion while achieving the same overall carrying capability, thereby reducing the elevator's elevation range requirements and simplifying the device structure.
Solution Approach 2:
The patent introduces a new dimensional approach by adding a holder that operates in the vertical dimension while the pair of hands operates horizontally. This dimensional separation allows the carrying range to be expanded without proportionally increasing the elevator's elevation range, as the vertical positioning is handled by the holder rather than requiring the elevator to cover the entire vertical span.
2Adaptability or versatility
If a single hand is used to carry substrates, then the device complexity is reduced, but the carrying range and flexibility are limited
Solution Approach 1:
The patent merges the functions of two hands and a holder into a coordinated system where the pair of hands handles horizontal substrate transfer and the holder manages vertical positioning. This combination allows the system to achieve expanded carrying range and flexibility while keeping each individual component relatively simple, balancing adaptability with device complexity.
3Adaptability or versatility
If the elevator mechanism is enlarged to cover a larger elevation range, then the carrying range is improved, but the facility size requirements increase
Solution Approach 1:
By segmenting the substrate transfer function between a pair of hands and a holder, the patent reduces the elevation range that the elevator mechanism must cover. This segmentation allows the facility size to be reduced because the elevator only needs to provide limited vertical motion, while the holder handles the majority of vertical positioning requirements.
Solution Approach 2:
The introduction of the holder as a separate vertical positioning mechanism allows the system to achieve large carrying range without requiring the elevator to span the entire vertical distance. This dimensional separation enables more compact facility design as the elevator mechanism can be smaller while still achieving the same overall substrate transfer capability.
Data Source
AI summary
A robot system includes a robot including a first hand, a second hand, an arm mechanism, and an elevator. The first hand is to hold a substrate. The second hand is to hold the substrate. The arm mechanism supports the first hand and the second hand to provide a height difference between the first hand and the second hand in a height direction of the robot. The elevator is to move the arm mechanism in the height direction within a moving range larger than the height difference. Both the first hand and the second hand put the substrate in the holder. Circuitry is configured to control the robot to move the arm mechanism in the height direction by the elevator to pass the substrate from the first hand to the second hand via the holder.