Dual-Hand Substrate Transfer Layout for Parallel Wafer Handling
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Solution Overview
Problem
Conventional substrate conveyance robots require time-consuming operations when placing and receiving substrates, leading to inefficiencies in substrate processing apparatuses.
Innovation Solution
The substrate processing apparatus employs a first and second hand configuration on a conveyance robot, with coordinated up-down movements to coincide with placement table intervals, allowing parallel operations for faster substrate delivery and receipt.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If sequential operations are used for substrate conveyance (place first substrate, then receive second substrate), then operational simplicity is maintained, but substrate conveyance efficiency deteriorates
Solution Approach 1:
The conveyance robot's hands are divided into multiple independent units (first hand, second hand) that can operate simultaneously. Each hand independently performs placement or reception operations, allowing parallel execution of multiple substrate handling tasks, thereby improving conveyance efficiency without requiring complex coordinated control
Solution Approach 2:
The patent introduces vertical stacking of placement tables (first placement table, second placement table positioned above) and corresponding hands. By utilizing the vertical dimension, the system enables simultaneous operations at different height levels, effectively parallelizing substrate conveyance operations and improving productivity
2Loss of time
If multiple placement tables are stacked vertically with matching hand intervals, then substrate conveyance time is reduced through parallel operations, but device structure complexity increases
Solution Approach 1:
The patent implements a nested configuration where the second hand and second placement table are positioned within the vertical space above the first hand and first placement table. This nested arrangement allows parallel operations without requiring excessive vertical space, reducing overall device footprint while enabling time-saving parallel substrate handling
Solution Approach 2:
The patent optimizes the vertical interval between hands to match the vertical interval between placement tables. By carefully adjusting these dimensional parameters, the system enables precise alignment for parallel operations while maintaining a compact structure, thus reducing conveyance time without proportionally increasing device complexity
3Productivity
If conventional single-hand conveyance robots are used, then device structure is simple, but substrate processing efficiency deteriorates due to sequential operations
Solution Approach 1:
The conveyance robot is segmented into multiple independent hands (first hand, second hand) that can simultaneously handle different substrates. This segmentation allows the robot to perform multiple substrate operations in parallel rather than sequentially, significantly improving processing efficiency while maintaining manageable structural complexity through modular hand design
Solution Approach 2:
Each hand of the conveyance robot is designed with universal functionality to perform both placement and reception operations. This multi-functionality allows the multi-hand robot to efficiently manage multiple substrates through parallel operations, improving productivity without requiring specialized components for each function
Data Source
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AI summary
The present invention relates to a substrate processing apparatus, a method for controlling the substrate processing apparatus, and a substrate conveyance apparatus. The substrate processing apparatus includes a conveyance robot including two hands and a controller. A support interval in an up-down direction between two support surfaces of the two hands is set to coincide with a placement interval in an up-down direction between two placement surfaces of two substrate placement tables. The controller causes a first hand to perform a first hand forward operation of moving forward, delivers a substrate to a first substrate placement table, and causes the first hand to perform a first hand backward operation of moving backward. The controller causes a second hand to perform a second hand forward operation of moving forward, receives a second substrate from a second substrate placement table, and causes the second hand to perform a second hand backward operation of moving backward. The controller causes the first hand and the second hand to perform the first hand backward operation and the second hand forward operation in parallel.