Dual-Heater Substrate Processing for Faster, Lower-Power Heating
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently heating substrates due to high power consumption and prolonged initial heating periods, particularly when relying solely on external heaters for temperature regulation.
Innovation Solution
The integration of internal heaters within the processing container, in addition to external heating, allows for simultaneous heating from both inside and outside, reducing power consumption and shortening the time required to reach target temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If only external heaters are used to heat substrates, then the heating structure is simple, but the power consumption is high and the heating time is prolonged
Solution Approach 1:
The heating system is segmented into external heaters and internal heaters that operate independently. The internal heaters are divided into multiple heating regions along the substrate processing direction, allowing selective and localized heating to reduce overall heating time while maintaining structural simplicity.
Solution Approach 2:
Internal heaters are nested within the processing container, positioned inside the substrate processing chamber. This nested configuration allows the internal heating elements to be integrated into the existing processing apparatus without significantly increasing external structural complexity, while enabling faster heating from the interior.
2Device complexity
If only external heaters are used to heat substrates, then the device structure is simple, but the power consumption is high
Solution Approach 1:
Different heating zones are created using internal heaters positioned at specific locations within the processing container. Each heating region can be independently controlled to provide localized heating where needed, reducing the total power consumption compared to uniform external heating of the entire substrate surface.
Solution Approach 2:
Internal heaters perform preliminary heating of substrates before they reach the main processing zone. This pre-heating action reduces the energy burden on external heaters and decreases overall power consumption by preparing substrates in advance during their transit through the processing chamber.
3Productivity
If internal heaters are added inside the processing container, then the heating efficiency is improved, but the device complexity increases
Solution Approach 1:
The internal heaters serve multiple functions: they provide primary heating, create temperature gradients for uniform in-plane temperature distribution, and can be selectively activated based on processing requirements. This multi-functionality justifies the added complexity by delivering superior heating efficiency and process control.
Solution Approach 2:
The heating system is made dynamic by enabling independent control of external and internal heaters, as well as selective activation of different internal heating zones. This dynamic control allows the system to adapt to various processing conditions and optimize heating efficiency for different substrate types and process requirements.
4Use of energy by moving object
If internal heaters are used to heat substrates, then the power consumption is reduced, but the device structure becomes more complex
Solution Approach 1:
The heating system is segmented into external heaters and internal heaters that operate independently. The internal heaters are divided into multiple heating regions along the substrate processing direction, allowing selective and localized heating to reduce overall heating time while maintaining structural simplicity.
Solution Approach 2:
Internal heaters are nested within the processing container, positioned inside the substrate processing chamber. This nested configuration allows the internal heating elements to be integrated into the existing processing apparatus without significantly increasing external structural complexity, while enabling faster heating from the interior.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables rapid temperature increase of substrates, reduces power consumption, and maintains uniform in-plane temperature distribution during substrate processing.
Implementation Method 1
an internal heater that is provided independently of the gas supply nozzle in the inside of the processing container and extends at a lateral side of the plurality of substrates in a direction in which the plurality of substrates are arranged to heat the plurality of substrates
Implementation Method 2
an external heater that heats the plurality of substrates from an outside of the processing container
Data Source
AI summary
A substrate processing apparatus includes a processing container that accommodates a plurality of substrates in an inside thereof to perform a substrate processing on the plurality of substrates, a gas supply nozzle that supplies a gas to the inside of the processing container, and an external heater that heats the plurality of substrates from an outside of the processing container. The substrate processing apparatus further includes an internal heater that is provided independently of the gas supply nozzle in the inside of the processing container and extends at a lateral side of the plurality of substrates in a direction in which the plurality of substrates are arranged to heat the plurality of substrates.