Inspection Device Dual-Holder Arm for Polishing Replacement
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Solution Overview
Problem
Existing inspection devices require manual replacement of polishing members, which disrupts the inspection process and necessitate temporary halts in operation.
Innovation Solution
An inspection device equipped with a transfer device that automates the loading and unloading of polishing members, utilizing a transfer arm to move substrates and polishing members between storage units and support units, allowing continuous operation without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual replacement of polishing member is performed, then the polishing member can be replaced, but the inspection operation must be temporarily stopped
Solution Approach 1:
The transfer device automatically performs the polishing member replacement operation without requiring manual intervention. The device loads a new polishing member from the polishing member storage unit and unloads the used polishing member to the polishing member storage unit automatically, enabling the system to service itself and maintain continuous inspection operations.
Solution Approach 2:
The polishing member storage unit is pre-configured with multiple polishing members in advance. When replacement is needed, the transfer device can immediately load a new polishing member from the pre-stored inventory without requiring any preparation or manual intervention, thus preventing inspection operation interruptions.
2Ease of operation
If manual replacement of polishing member is performed, then the polishing member can be replaced, but downtime occurs
Solution Approach 1:
The transfer device enables continuous polishing member replacement without interrupting the inspection operation. By automatically loading new polishing members and unloading used ones during the inspection process, the system maintains continuous useful action and eliminates the downtime that would otherwise occur during manual replacement operations.
Solution Approach 2:
The system performs self-service by automatically managing the polishing member replacement process. The transfer device independently loads new polishing members from the storage unit and unloads used ones, eliminating the need for manual intervention and associated downtime, thereby maintaining continuous inspection operations.
3Extent of automation
If transfer device with transfer arm is used, then polishing member replacement is automated, but device complexity increases
Solution Approach 1:
The transfer device is designed with multi-functionality to justify its complexity. It can automatically perform both the loading of new polishing members from the polishing member storage unit and the unloading of used polishing members to the same storage unit. This dual functionality consolidates what would otherwise require separate mechanisms into a single integrated device.
Solution Approach 2:
The transfer arm serves as an intermediary mechanism that bridges the polishing member storage unit and the polishing member support unit. It automatically transfers polishing members between these components, enabling automated replacement while containing the added complexity within a dedicated transfer mechanism rather than requiring complex integration throughout the entire inspection device.
Data Source
AI summary
An inspection device includes a first stage that supports a substrate to be in contact with one or more contact probes, a second stage that is disposed in a vicinity of the first stage, and supports a polishing member capable of polishing the one or more contact probes, a substrate storage that stores one or more substrates including the substrate, a polishing member storage that stores one or more polishing members including the polishing member, and a transfer device including a transfer arm that transfers the substrate between the first stage and the substrate storage, and transfers the polishing member between the second stage and the polishing member storage. The transfer arm includes a first holder capable of holding the substrate, and a second holder capable of holding the polishing member at a different position from the first holder.