Dual Illumination Imprint Apparatus for Precise Curing Control

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Solution Overview

Problem

Existing imprint apparatuses irradiate the outer peripheral region of a mold with light, causing the imprint material to cure outside the pattern region, which leads to unwanted curing of uncured imprint material and material that has protruded beyond the pattern region.

Innovation Solution

The imprint apparatus employs a dual illumination system, where a first illumination unit cures the imprint material within the pattern region, and a second illumination unit, controlled by a light quantity measuring unit, adjusts its irradiation region to avoid curing the material outside the pattern region, ensuring precise curing only within the intended pattern area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the imprint apparatus irradiates the outer peripheral region of the mold with light to increase the viscosity of the imprint material, then the imprint material is prevented from protruding, but the uncured imprint material outside the pattern region is cured and the protruded material is cured

Engineering Contradiction:

Improveprevention of material protrusionVSAvoidunwanted curing of material outside pattern region

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The illumination system is divided into two separate units: a first illumination unit that irradiates the pattern region and a second illumination unit that irradiates the outer peripheral region. This segmentation allows each unit to be independently controlled, enabling the first unit to cure material within the pattern region while the second unit selectively irradiates only the outer peripheral region without curing material outside the pattern region, thus resolving the contradiction between preventing protrusion and avoiding unwanted curing.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the mold are given different illumination characteristics: the pattern region receives illumination from the first illumination unit with specific intensity and duration to cure the imprint material, while the outer peripheral region receives illumination from the second illumination unit with controlled parameters to increase viscosity without causing unwanted curing. This local differentiation of illumination quality allows simultaneous achievement of both objectives.

Inventive Principle:

Principle #3Local quality

2Device complexity

If a single illumination unit is used to irradiate the entire mold, then the device complexity is reduced, but the curing precision is compromised due to inability to distinguish pattern region from outer peripheral region

Engineering Contradiction:

Improveillumination system structureVSAvoidcuring position accuracy

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The single illumination unit is segmented into two independently controllable illumination units: the first illumination unit for the pattern region and the second illumination unit for the outer peripheral region. Each unit can be independently positioned and controlled, enabling precise differentiation between the pattern region and outer peripheral region, thus achieving high curing precision while maintaining reasonable device complexity through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The illumination system employs dynamic control where the second illumination unit can adjust its irradiation parameters (intensity, duration, position) based on real-time detection of the mold's outer peripheral region. This dynamic adjustment capability allows the system to adapt to different mold configurations and maintain precise curing boundaries, resolving the contradiction between device simplicity and curing precision.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution prevents unwanted curing of the imprint material outside the pattern region, ensuring accurate transfer of the mold pattern onto the substrate while maintaining efficient curing within the designated area.

Implementation Method 1

a first illumination unit configured to emit light that cures the composition

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

a second illumination unit configured to emit light that cures the composition

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS12337509B2Imprint apparatus, imprint method, and method of manufacturing article

Publication Date: 2025.06.24 CANON KK

AI summary

An imprint apparatus which performs imprint processing by using a mold having a protruding portion and by bringing the protruding portion into contact with a composition on a substrate, the imprint apparatus comprising: a first illumination unit configured to emit light that cures the composition; a second illumination unit configured to emit light that cures the composition; and a control unit configured to perform control processing such that the composition at a position corresponding to a first region of the protruding portion is irradiated with the light from the first illumination unit and perform control processing such that the composition at a position corresponding to a second region outside the first region of the protruding portion is irradiated with the light from the second illumination unit.