Dual Imaging Assembly for X-ray Navigation Accuracy
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Solution Overview
Problem
Existing X-ray analysis systems face challenges in achieving accurate navigation and measurement at small measurement sites within semiconductor substrates, due to limitations in positioning accuracy and alignment precision.
Innovation Solution
The system employs a combination of first and second imaging assemblies, along with a processor, to produce images of a measurement site. The processor controls movements of the sample relative to the measurement assembly, using optical microscopes and cameras, to align the measurement site with the measurement position, thereby improving navigation accuracy and enabling precise X-ray measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single imaging assembly is used for navigation, then the system complexity is low, but the navigation accuracy and alignment precision are insufficient
Solution Approach 1:
The imaging system is divided into two separate imaging assemblies: a first imaging assembly for low-magnification overview imaging and a second imaging assembly for high-magnification precision imaging. This segmentation allows each assembly to be optimized for its specific function, with the first assembly providing broad navigation capability and the second assembly delivering precise alignment accuracy, thereby resolving the contradiction between navigation accuracy and system complexity.
Solution Approach 2:
The patent introduces a dual-imaging-dimension approach by using two imaging assemblies with different magnification capabilities operating in parallel. The first imaging assembly operates at low magnification for coarse positioning, while the second operates at high magnification for fine alignment. This multi-dimensional imaging strategy enables the system to achieve high navigation accuracy without requiring an overly complex single-system solution.
2Area of stationary object
If the measurement assembly is positioned far from the sample, then the measurement area is large, but the positioning accuracy decreases
Solution Approach 1:
The imaging function is segmented into two assemblies with different working distances. The first imaging assembly is positioned farther from the sample to provide a large field of view for navigation, while the second imaging assembly is positioned closer to achieve high positioning accuracy. This segmentation allows the system to simultaneously access both large measurement area and high positioning accuracy by using the appropriate imaging assembly for each task.
Solution Approach 2:
The patent employs a multi-dimensional imaging approach where two imaging assemblies operate at different spatial dimensions and magnification levels. The first imaging assembly provides broad spatial coverage for area-wide navigation, while the second imaging assembly provides high-resolution imaging for precise positioning. This dimensional differentiation resolves the contradiction between measurement area and positioning accuracy.
Data Source
AI summary
A system for X-ray measurement includes first and second X-ray measurement channels, each including X-ray source configured to apply an X-ray beam to a respective measurement site on a sample and an X-ray detector assembly (XDA) configured to sense X-ray emission from the respective measurement site. An imaging assembly is configured to capture an image of the sample. A processor is configured to align the first and second X-ray measurement channels with respective first and second measurement sites using the captured image.