Dual-Layer End Effector Pad for Stable Substrate Vacuum Adsorption
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Solution Overview
Problem
Existing transfer units struggle to stably vacuum-adsorb substrates for prolonged periods due to material wear and inadequate elasticity during substrate handling.
Innovation Solution
A transfer unit with an end effector featuring a dual pad layer configuration, where a first pad layer with higher elasticity and a second pad layer with greater hardness are stacked, ensuring stable substrate adsorption and minimizing wear, while maintaining effective vacuum contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single pad material is used for vacuum adsorption, then the structure is simple, but the adsorption stability and durability are insufficient
Solution Approach 1:
The pad is constructed using composite materials with two distinct layers: a lower layer made of a soft, elastic material (such as silicone rubber or fluororesin) and an upper layer made of a harder material (such as PEEK or carbon PEEK). This composite structure combines the advantages of both materials to achieve stable vacuum adsorption while maintaining structural integrity and reducing wear during substrate handling.
2Strength
If a hard pad material is used, then wear resistance is improved, but vacuum adsorption stability deteriorates
Solution Approach 1:
The pad structure applies the local quality principle by assigning different material properties to different regions (layers) of the pad. The lower layer uses soft, elastic materials that provide conformability and stable vacuum adsorption, while the upper layer uses hard, wear-resistant materials that contact the substrate directly. This spatial differentiation of material properties allows the pad to simultaneously achieve both wear resistance and adsorption stability.
3Reliability
If a soft pad material is used, then vacuum adsorption stability is improved, but wear resistance deteriorates
Solution Approach 1:
The pad is constructed using composite materials with two distinct layers: a lower layer made of a soft, elastic material (such as silicone rubber or fluororesin) and an upper layer made of a harder material (such as PEEK or carbon PEEK). This composite structure combines the advantages of both materials to achieve stable vacuum adsorption while maintaining structural integrity and reducing wear during substrate handling.
4Ease of manufacture
If the pad structure is simplified, then manufacturing is easier, but operational lifespan is reduced
Solution Approach 1:
The pad is segmented into two distinct layers with different material properties, where the lower layer provides elastic support and vacuum sealing, and the upper layer provides wear-resistant contact with the substrate. This segmentation allows each layer to perform its specific function optimally, extending the operational lifespan of the pad while maintaining manufacturability through established multi-layer fabrication techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dual pad layer design enhances the transfer unit's ability to securely hold substrates, reducing material wear and facilitating easy separation during vacuum release, thereby extending the unit's operational lifespan.
Implementation Method 1
a vacuum hole formed in the body
Implementation Method 2
the transfer unit may pick up and transfer the substrate using a vacuum adsorption method
Implementation Method 3
the first pad layer has greater elasticity than the second pad layer
Implementation Method 4
the second pad layer has greater hardness than the first pad layer
Data Source
AI summary
Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer.