Dual-Lifter Substrate Holder Mechanism With Nested Bellows Sealing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently raising and lowering substrate holders while maintaining airtightness and minimizing the overall height of the apparatus.
Innovation Solution
A lifting mechanism comprising a support, a first lifter, and a second lifter configured to raise and lower a substrate holder, with inner and outer bellows that expand and retract in opposite directions to maintain airtightness and reduce height.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single lifter is used to raise and lower the substrate holder, then the device complexity is reduced, but the reliability of vertical positioning is insufficient
Solution Approach 1:
The lifting system is divided into two independent lifters (first lifter and second lifter) that operate in parallel. Each lifter independently supports the substrate holder, providing redundant positioning capability and improved reliability without requiring a single complex mechanism
2Length of moving object
If the apparatus height is increased to accommodate lifting mechanisms, then the lifting range is improved, but the overall apparatus height increases
Solution Approach 1:
The first and second bellows are arranged concentrically, with the first bellows positioned inside the second bellows. This nested configuration allows both lifting mechanisms to be compactly integrated vertically, achieving the required lifting range while minimizing the overall apparatus height
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mechanism allows for efficient vertical movement of substrate holders between processing and transfer positions while preserving airtightness and reducing the apparatus's overall height, thereby enhancing operational efficiency and cost-effectiveness.
Implementation Method 1
inner and outer bellows that expand and retract in opposite directions to maintain airtightness
Data Source
AI summary
A lifting mechanism for raising and lowering a substrate holder that holds a plurality of substrates in a shelf-like manner, includes: a support configured to support the substrate holder; a first lifter connected to the support and configured to raise and lower the support; and a second lifter provided in parallel with the first lifter and configured to raise and lower the first lifter.