Dual-Link Arm Linear Robot for Compact Semiconductor Tool Layout
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Solution Overview
Problem
Modern semiconductor factories face challenges in fitting more process equipment in a smaller space due to the limitations of traditional cluster tool layouts, which are not optimally shaped for linear arrangements, leading to increased complexity and cost in automation systems.
Innovation Solution
The use of a dual-link arm robot with a robot drive and controller that allows the robot arm to extend and retract synchronously with the linear transport along a straight path, enabling efficient movement of substrates into and out of process chambers while reducing the overall width and complexity of the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a traditional cluster tool layout is used, then substrates can be processed in multiple chambers, but the tool width increases and floor space expands
Solution Approach 1:
The patent transitions from a traditional radial cluster tool layout to a linear arrangement where process chambers are positioned along a straight line. The robot arm operates in a linear path rather than rotating radially, changing the spatial dimension of substrate transport from circular to linear, thereby reducing tool width while maintaining multi-chamber processing capability
Solution Approach 2:
The robot arm is designed with extendable and retractable links that can dynamically adjust its length and position. The arm extends to reach into process chambers and retracts to a compact position, allowing the system to adapt its footprint dynamically rather than requiring static space for maximum reach, thus reducing overall tool width
2Ease of operation
If the robot arm extends to reach process chambers, then substrate access is enabled, but the system complexity increases
Solution Approach 1:
The robot arm is divided into multiple discrete links (first link, second link, third link) that can move independently relative to each other. This segmentation allows each link to perform a specific function (extension, articulation, positioning) and simplifies the control of complex motion by breaking it down into manageable segments that can be controlled sequentially
Solution Approach 2:
The robot arm mechanism serves multiple functions: it transports substrates between chambers, positions substrates precisely at chamber entrances, and can adjust its configuration to access different chambers along the linear path. This multi-functionality reduces the need for separate mechanisms for each task, thereby managing system complexity while maintaining operational versatility
Data Source
AI summary
An apparatus including a linear transport configured to move in a transport chamber along a straight path; a robot connected to the linear transport, where the robot includes a robot drive and a robot arm connected to the robot drive, where the robot arm is a dual-link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; a controller connected to the linear transport and to the robot drive, where the controller is configured to provide movement of the linear transport along the straight path at a same time as extension and retraction of the dual-link arm to thereby move the end effector into or out of a substrate process chamber or a substrate holding area while both the linear transport and the dual-link arm are moving.