Dual Load-Lock Consumable Transfer for Vacuum Chamber Uptime
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Solution Overview
Problem
Existing plasma processing systems face inefficiencies due to the need for frequent replacement of consumables like focus rings, which requires downtime and disrupts the operation of the vacuum processing chamber.
Innovation Solution
A system is implemented with an atmospheric-pressure transfer chamber, vacuum transfer chamber, load-lock modules, and transfer mechanisms to concurrently replace used and unused consumables in a vacuum processing chamber, minimizing downtime by transferring them under reduced pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If consumables are replaced by loading and unloading without exposing the processing chamber to atmosphere, then the chamber remains sealed and vacuum integrity is maintained, but the replacement process requires sequential operations that increase outage time
Solution Approach 1:
The system prepares replacement consumables in advance by storing them in containers within the atmospheric-pressure transfer chamber. The load-lock modules are pre-configured with both used and unused consumables, allowing the replacement operation to begin immediately when triggered, without requiring sequential preparation steps during the actual replacement process.
Solution Approach 2:
The dual load-lock module design enables continuous replacement operations where one module transfers unused consumables to the processing chamber while the other simultaneously transfers used consumables to storage. This parallel operation eliminates idle time between replacement steps, maintaining continuous productive action throughout the consumable replacement process.
2Device complexity
If a single load-lock module is used for consumable replacement, then the system structure is simpler, but the replacement process must be sequential, increasing total replacement time
Solution Approach 1:
The consumable replacement function is segmented into two independent load-lock modules: one dedicated to transferring unused consumables to the processing chamber, and the other dedicated to transferring used consumables to storage. This segmentation allows both transfer operations to occur simultaneously without interfering with each other, effectively halving the total replacement time compared to a single-module sequential approach.
Solution Approach 2:
The system merges the functions of consumable input and output operations into a unified dual-module architecture that operates in parallel. Both load-lock modules share the same atmospheric-pressure transfer chamber and are coordinated by a single controller, combining the benefits of parallel processing with centralized control and space-efficient design.
3Reliability
If consumables are transferred through the vacuum transfer chamber, then vacuum integrity is maintained, but the transfer mechanism must operate in vacuum conditions which complicates the transfer system
Solution Approach 1:
The atmospheric-pressure transfer chamber serves as an intermediary space that receives consumables from the atmospheric environment and prepares them for vacuum transfer. This intermediary chamber allows consumables to be loaded and positioned under atmospheric pressure using simple mechanical mechanisms, then transferred to the vacuum environment only when ready, simplifying the overall transfer system while maintaining vacuum integrity.
Data Source
AI summary
A system of processing a substrate includes an atmospheric-pressure transfer chamber, at least one vacuum processing chamber, at least two load-lock modules, a vacuum transfer chamber, a plurality of load ports, and a first transfer mechanism and a second transfer mechanism. The load ports are attached to the atmospheric-pressure transfer chamber and detachable containers are mounted on the load ports, respectively. A controller controls the first transfer mechanism and the second transfer mechanism to concurrently transfer a used consumable from the containers to the vacuum processing chamber through the atmospheric-pressure transfer chamber and one of the load-lock modules and to transfer a used consumable from the vacuum processing chamber through the vacuum transfer chamber and another one of the load-lock modules.