Dual-Loop Pressure Control for Stable Ink Reservoir Meniscus

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Solution Overview

Problem

Existing pressure control systems for inkjet nozzles struggle to maintain stable internal air pressure in ink reservoirs, affecting the precision of ink ejection and meniscus control, which is crucial for thin film formation in display and semiconductor processes.

Innovation Solution

A pressure control device with an input terminal, intake and exhaust valves, a pressure sensor, and a controller that operates dual control loops to adjust the degree of opening of the valves based on sensed pressure values, allowing for simultaneous and independent control of intake and exhaust operations to stabilize air pressure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional pressure control system is used, then the structure is simple, but the air pressure control precision is insufficient

Engineering Contradiction:
Improveair pressure control precisionVSAvoidcontrol system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The pressure control system is segmented into two independent control loops: a first control loop controlling the intake valve and a second control loop controlling the exhaust valve. Each loop independently adjusts its valve based on pressure sensor feedback, enabling precise dual-directional pressure control without requiring a complex single-loop system

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system dynamically changes the opening degrees of both intake and exhaust valves as controllable parameters. By independently adjusting these two parameters based on real-time pressure feedback, the system achieves precise pressure control that exceeds conventional single-parameter control systems

Inventive Principle:
Principle #35Parameter changes

2Speed

If single-loop control is used, then the device complexity is low, but the response speed to pressure changes is slow

Engineering Contradiction:
Improvepressure response speedVSAvoidcontrol loop complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The control system is divided into two parallel control loops that simultaneously monitor pressure and adjust their respective valves. This segmentation allows independent optimization of each loop's response characteristics, achieving faster overall pressure response compared to a single sequential control loop

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Both control loops operate continuously and simultaneously, with the intake valve controlling pressure rise and the exhaust valve controlling pressure release. This continuous dual-action control eliminates the idle time present in sequential single-loop systems, maintaining constant pressure regulation responsiveness

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise control of air pressure, stabilizing the meniscus and ensuring consistent ink ejection, thereby improving the quality of thin film formation in inkjet processes.

Implementation Method 1

a pressure sensor connected to the output terminal and generating a sensed value by sensing pressure at the output terminal

Methodology Applied
Scientific EffectPressure sensing:

Data Source

PatentUS12134271B2Pressure control device and substrate treatment apparatus including the same
Publication Date: 2024.11.05 SYSTEM ENGINEERING MEGA SOLUTION CO LTD
  • US12134271B2 patent drawing
  • US12134271B2 patent drawing
  • US12134271B2 patent drawing

AI summary

Provided is a pressure control device for stably controlling the internal air pressure of a reservoir. The pressure control device includes: an input terminal receiving source air pressure; an intake valve connected between the input terminal and an output terminal; an exhaust valve connected to the output terminal; a pressure sensor connected to the output terminal and generating a sensed value by sensing pressure at the output terminal; and a controller simultaneously operating the intake valve and the exhaust valve by simultaneously operating a first control loop for adjusting the degree of opening of the intake valve by comparing the sensed value with a first target value and a second control loop for adjusting the degree of opening of the exhaust valve by comparing the sensed value with a second target value.