Pressure Sensor With Dual Magnetic Sensing Elements

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Solution Overview

Problem

Conventional pressure sensors face limitations in achieving a wide dynamic range for sensing both small and large pressures with high sensitivity, particularly in applications like microphones and touch panels, where they often suffer from limited operational strain range and distorted signals at high sound levels.

Innovation Solution

The proposed solution involves a pressure sensor design with a deformable film portion and multiple sensing elements, each with distinct magnetic layers and compositions, allowing for differential strain sensitivity and magnetoresistance changes to be utilized by a processor for enhanced signal output across a broader pressure range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single sensing element is used in the pressure sensor, then the device structure is simple, but the dynamic range is limited and cannot sense both small and large pressures with high sensitivity

Engineering Contradiction:
ImprovesensitivityVSAvoiddynamic range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The pressure sensor is divided into multiple sensing elements (first sensing element and second sensing element) with different magnetic layer compositions. Each sensing element is optimized for different pressure ranges, allowing the sensor to cover a wide dynamic range while maintaining high sensitivity across the entire range through segmentation of the sensing function.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If the magnetic layer uses a single material composition, then the manufacturing process is simple, but the strain sensitivity range is limited

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidstrain sensitivity range
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

Different magnetic layer compositions are used in different sensing elements based on their specific sensing requirements. The first magnetic layer uses a first composition optimized for certain strain ranges, while the second magnetic layer uses a second composition optimized for other strain ranges, allowing each region to have the quality needed for its specific function.

Inventive Principle:
Principle #3Local quality

3Device complexity

If conventional pressure sensor design is used, then the device structure is simple, but signal distortion occurs at high sound levels

Engineering Contradiction:
Improvesensor structureVSAvoidsignal fidelity
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The pressure sensor employs composite magnetic layer structures with different material compositions in different sensing elements. This composite approach allows the sensor to maintain linear response and high signal fidelity across a wide pressure range, preventing distortion at high sound levels while keeping the overall device structure relatively simple.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables a pressure sensor with high sensitivity and a wide dynamic range, effectively sensing small and large pressures with improved signal fidelity and reduced distortion, suitable for applications in microphones and touch panels.

Implementation Method 1

the first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer... the second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Data Source

PatentUS10481027B2Sensor, electronic device, microphone, blood pressure sensor, and touch panel
Publication Date: 2019.11.19 KK TOSHIBA
  • US10481027B2 patent drawing
  • US10481027B2 patent drawing
  • US10481027B2 patent drawing

AI summary

According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.