Dual-MEMS Bending Transducer for Linear Wide-Range Deflection
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Solution Overview
Problem
Micromechanical components, such as MEMS, face challenges in achieving linear transmission characteristics, leading to non-linearities that result in high distortion factors in applications like loudspeakers and microphones, requiring complex corrections and limited dynamic and frequency ranges, making them unsuitable for mobile applications.
Innovation Solution
A bending transducer system with two MEMS transducers positioned along the center of gravity fiber, where the electrical signals are phase-shifted to improve linearity, allowing for adjustable sensitivity and frequency without compromising linearity, and a control system that adjusts bias voltages to compensate for asymmetrical loads and optimize spring stiffness and resonance frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional MEMS transducers are used, then the device structure is simple, but the transmission characteristics are non-linear leading to high distortion factors
Solution Approach 1:
The patent divides the MEMS transducer into two separate transducers (first and second MEMS transducers) positioned on opposite sides of the deflectable element. Each transducer handles one polarity of the signal, segmenting the non-linear response into two complementary linear responses that together produce overall linear transmission characteristics.
Solution Approach 2:
The patent introduces asymmetry in the positioning and configuration of the two MEMS transducers relative to the centroid fiber of the deflectable element. This asymmetric arrangement allows each transducer to operate in its optimal linear range while compensating for the inherent non-linearity of individual MEMS transducers when used alone.
2Productivity
If the amplitude range is increased, then the dynamic range is improved, but the linearity deteriorates due to larger deflections
Solution Approach 1:
By segmenting the signal handling between two transducers, each transducer operates over a smaller deflection range while maintaining linearity. The combined output of both transducers achieves a large overall dynamic range without sacrificing the linearity that would be lost in a single transducer operating over the full range.
Solution Approach 2:
Each MEMS transducer is designed to operate only partially (handling one polarity), which keeps individual deflections within the linear range. The excessive action of using two transducers instead of one enables the system to achieve both large dynamic range and maintained linearity.
3Adaptability or versatility
If the frequency range is extended, then the versatility is improved, but the linearity deteriorates due to frequency-dependent effects
Solution Approach 1:
The patent employs dynamic control of the two MEMS transducers with phase-shifted electrical signals that can be adjusted according to frequency. This dynamic signal adjustment compensates for frequency-dependent non-linearities, allowing the system to maintain linearity across a wide frequency range and thereby improve versatility.
4Measurement precision
If sensitivity is increased, then the measurement precision is improved, but the linearity deteriorates due to amplified non-linear effects
Solution Approach 1:
The patent segments the sensitive measurement function between two transducers, allowing each to operate at optimal sensitivity settings while their combined output maintains linearity. This segmentation enables high measurement precision without the linearity degradation that would occur in a single high-sensitivity transducer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a large linearity range with high dynamics across a wide frequency range, reducing harmonic distortion and enabling efficient operation as both actuators and sensors with reduced power consumption and cost-effective control electronics.
Implementation Method 1
a first microelectromechanical transducer (hereinafter referred to as MEMS transducer) extending along the centroid fiber of the deflectable element and a second MEMS transducer extending along the centroid fiber
Implementation Method 2
a bending transducer used as a sensor can be obtained with improved and adjustable linearity at comparable performance
Data Source
Figure 1
Figure 2~3
Figure 4a~4b
AI summary
The invention relates to a bending transducer operated as an actuator, comprising a deflectable element, a micro-electromechanical transducer which extends along a centroidal line of the deflectable element and deflects the deflectable element in a first direction (161, 161b) when a first electrical signal is applied, and a second micro-electromechanical transducer which extends along the centroidal line and deflects the deflectable element in a second direction opposite the first direction when a second electrical signal is applied, wherein the centroidal line is located between sides of the first and the second micro-electromechanical transducers facing away from one another, and an electrical controller which is designed to modify the first electrical signal and the second electrical signal according to an input signal, such that a changing of the first electrical signal and a changing of the second electrical signal takes places in accordance with the electrical input signal, and the phases of the first and second electrical signals are shifted relative to one another. The invention also relates to a bending transducer operated as a sensor.