Dual-Mode AGV Docking for Precise Semiconductor Module Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Manual transportation and precise alignment of semiconductor equipment modules in fabrication bays are time-consuming and costly due to the need for precise x, y, z, and theta alignment, which is challenging under modern manufacturing pressures.
Innovation Solution
A dual-mode autonomous guided vehicle (AGV) with a chassis, drive means for transportation, a Cartesian x-y movement table for precise docking, and a z-direction lift mechanism to autonomously position and dock modules with sensors and cameras for alignment assistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual maneuvering and alignment methods (casters, air skids, lift trucks) are used, then equipment modules can be transported and positioned, but the process is time-consuming and costly due to the need for precise x, y, z, and theta alignment
Solution Approach 1:
The patent replaces manual mechanical alignment methods with an automated robotic system featuring a robotic arm equipped with sensors and vision systems. The robotic arm autonomously maneuvers equipment modules and performs precise alignment in x, y, z coordinates and theta rotation, eliminating the need for manual operation with casters, air skids, or lift trucks while achieving both high precision and reduced docking time
Solution Approach 2:
The system enables self-service through autonomous operation where the robotic arm independently performs transportation, positioning, and alignment of equipment modules without human intervention. The integrated sensors and control systems allow the robot to self-correct positioning errors and achieve precise docking automatically
2Productivity
If manual alignment operations are performed under time pressures, then manufacturing schedules can be maintained, but the degree of docking precision required becomes very challenging to achieve
Solution Approach 1:
The patent replaces time-consuming manual alignment operations with an automated robotic system that can simultaneously achieve high speed and high precision. The robotic arm's controlled motion systems and integrated sensors enable rapid yet precise positioning and docking of equipment modules, eliminating the trade-off between speed and precision that plagues manual operations
Solution Approach 2:
The system incorporates sensors and vision systems that provide real-time feedback during the docking process. This feedback allows the robotic arm to continuously monitor and adjust its position and orientation, ensuring precise alignment is achieved rapidly even under time pressures by automatically correcting deviations from the target position
Data Source
AI summary
In some examples, a dual-mode autonomous guided vehicle (AGV) is provided for docking a module in a fabrication bay. An example AGV may comprise a chassis for supporting the module on the AGV; drive means to transport the AGV under autonomous guidance, in a module transportation mode, to a specified location within the fabrication bay; a Cartesian x-y movement table to move the module under autonomous guidance, in a module docking mode, in an x- or y-docking direction, into a specific docking position; and a z-direction lift mechanism to move the module in a z-docking direction during the module docking mode.