Dual-Mode Robot for Substrate Transfer and Metrology
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional electronic device manufacturing systems require separate transfer robots and motion stages, leading to reduced throughput, increased chances of contamination, error, and substrate damage due to the need for hand-offs between these components.
Innovation Solution
A dual-mode robot system that can operate in both transfer and process modes, allowing it to move substrates between system components and perform processes like metrology without the need for a separate motion stage, by locking or unlocking joints to restrict motion to what is necessary for specific processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If separate transfer robots and motion stages are used, then the system can perform substrate transfer and processing functions, but the throughput is reduced and the chances of contamination, error, and substrate damage increase due to hand-offs between components
Solution Approach 1:
The patent combines the transfer robot and motion stage into a single integrated robot system that can perform both substrate transfer and processing functions. The robot includes a transfer mode for moving substrates between system components and a process mode for executing precise motion profiles during processing operations, eliminating the need for separate components and hand-offs.
Solution Approach 2:
The robot is designed with multi-functionality to perform both substrate transfer operations and processing operations. By switching between transfer mode and process mode, the single robot system replaces multiple specialized components, reducing system complexity while maintaining or improving throughput.
2Productivity
If separate transfer robots and motion stages are used, then the system can perform substrate transfer and processing functions, but the system footprint increases
Solution Approach 1:
The patent combines the transfer robot and motion stage into a single integrated robot system that can perform both substrate transfer and processing functions. The robot includes a transfer mode for moving substrates between system components and a process mode for executing precise motion profiles during processing operations, eliminating the need for separate components and hand-offs.
3Productivity
If a dual-mode robot system is used, then throughput increases and system footprint is reduced, but the robot must switch between transfer mode and process mode requiring complex control
Solution Approach 1:
The robot system dynamically switches between transfer mode and process mode based on operational requirements. The control system adapts the robot's motion characteristics, enabling it to perform rapid substrate transfer operations or precise processing motion profiles as needed, with mode transitions managed automatically to maintain ease of operation despite the dual functionality.
Data Source
AI summary
Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).