Dual-Output High Frequency Generator for Plasma Chamber Control
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Solution Overview
Problem
Current high frequency generators are limited in their ability to supply high frequency power signals to both electrodes of a plasma chamber, making it difficult to precisely control plasma generation and adapt to changes in load impedance.
Innovation Solution
A high frequency generator with dual outputs, featuring a high frequency amplifying unit, combiner, high frequency sensor, controller, and switching unit, which outputs high frequency power signals to both electrodes of the plasma chamber, along with a monitoring system to detect and adjust for impedance changes and noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If two separate high frequency plasma supply devices are used to supply high frequency power to upper and lower electrodes, then plasma generation control flexibility is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines two separate high frequency plasma supply devices into a single dual-output high frequency generator. The generator includes a high frequency amplifying unit that outputs signals to both an upper electrode and a lower electrode through a switching unit, thereby reducing device complexity while maintaining plasma generation control flexibility.
Solution Approach 2:
The high frequency generator is designed with multi-functionality to serve multiple purposes. It can supply high frequency power signals to both upper and lower electrodes simultaneously or independently, allowing a single device to perform the functions previously requiring two separate devices, thus improving adaptability while reducing complexity.
2Device complexity
If high frequency power is supplied to only one electrode with the other grounded, then device complexity is reduced, but plasma generation control precision deteriorates
Solution Approach 1:
The patent implements a switching unit that dynamically switches between different output configurations. The switching unit can connect the high frequency power signal to either the upper electrode or the lower electrode based on process requirements, enabling precise control of plasma generation while maintaining a relatively simple single-generator structure.
3Device complexity
If a single high frequency generator is used to supply power to one electrode, then device complexity is reduced, but adaptability to supply power to both electrodes deteriorates
Solution Approach 1:
The patent segments the output of the single high frequency generator into two separate output paths. The high frequency amplifying unit generates a signal that is distributed through a switching unit to either the upper electrode or the lower electrode, allowing the single generator to adaptively supply power to both electrodes when needed while maintaining low device complexity.
Data Source
AI summary
A high frequency generator having dual outputs comprises: a high frequency amplifying unit configured to amplify a DC voltage of a predetermined level, and output a first and a second high frequency amplification signal; a combiner configured to combine the first high frequency amplification signal and the second high frequency amplification signal, and output a high frequency power signal; a high frequency sensor disposed on output side of the combiner, configured to detect an electrical signal flowing the output side of the combiner, and output an electrical detection signal; a controller configured to output multiple control signals by using an externally applied control signal and the electrical detection signal; and a switching unit disposed between the combiner and the plasma chamber, and controlled by a switching control signal outputted from the controller to output the high frequency power signal to a first high frequency power output signal through a first output terminal and to output the high frequency power signal to a second high frequency power signal through a second output terminal.