Dual-Path Sulfuric Acid Delivery for Stable Substrate Cleaning
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Solution Overview
Problem
The rapid temperature changes and high temperatures of sulfuric acid-hydrogen peroxide mixtures used in substrate processing can cause damage to substrates, such as peeling of patterns, and adjusting the mixing ratio of sulfuric acid and hydrogen peroxide is time-consuming.
Innovation Solution
A substrate processing apparatus with separate paths for sulfuric acid, one heated and one unheated, allows controlled mixing and ejection of sulfuric acid and hydrogen peroxide solutions onto the substrate to maintain stable temperatures, preventing violent reactions and substrate damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If sulfuric acid and hydrogen peroxide solution are mixed at high temperature to process the substrate, then the processing effectiveness is improved, but the substrate temperature changes rapidly causing damage such as pattern peeling
Solution Approach 1:
The sulfuric acid supply path is divided into two separate paths: a first path with a heater for heating sulfuric acid, and a second path without heating. This segmentation allows selective mixing of heated or unheated sulfuric acid with hydrogen peroxide solution to control reaction temperature and prevent substrate damage
Solution Approach 2:
The temperature of sulfuric acid is changed as a controllable parameter. By adjusting whether to heat the sulfuric acid in the first path before mixing with hydrogen peroxide solution, the reaction temperature can be controlled to achieve effective processing while preventing excessive temperature rise that causes substrate damage
2Stability of the object's composition
If the mixing ratio of sulfuric acid and hydrogen peroxide solution is adjusted to prevent substrate damage, then the substrate temperature stability is improved, but the adjustment process takes time
Solution Approach 1:
Instead of adjusting the mixing ratio of sulfuric acid and hydrogen peroxide solution, the invention changes the temperature parameter of sulfuric acid by selecting different paths (heated or unheated). This parameter change achieves substrate temperature stability without requiring time-consuming mixing ratio adjustments
Solution Approach 2:
The supply path is segmented into heated and unheated routes, allowing rapid switching between different temperature conditions. This eliminates the need for gradual mixing ratio adjustments and reduces the time required to achieve stable substrate temperature
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively stabilizes substrate temperatures during processing, reducing the risk of damage and eliminating the need for time-consuming mixing ratio adjustments.
Implementation Method 1
a first heater that heats a heating region of the first path
Implementation Method 2
when sulfuric acid and a hydrogen peroxide solution are mixed, the sulfuric acid and the hydrogen peroxide solution react, and the temperature of the sulfuric acid-hydrogen peroxide mixture becomes high
Data Source
AI summary
A substrate processing apparatus includes a first tank, a path including a first path, a first heater, a hydrogen peroxide supply path, and a controller. The first path allows sulfuric acid to be supplied therethrough from the first tank to a nozzle. The first heater heats a heating region of the first path. The controller controls ejecting sulfuric acid heated by the first heater and a hydrogen peroxide solution from the nozzle onto a substrate, the sulfuric acid and the hydrogen peroxide solution on the substrate having been mixed, and then ejecting sulfuric acid having a temperature lower than a temperature of the sulfuric acid heated by the first heater and the hydrogen peroxide solution from the nozzle onto the substrate, the sulfuric acid and the hydrogen peroxide solution on the substrate having been mixed.